MKS 937B - 3 Feature and Control Locations; 3.1 Front Panel Controls and Indicators; 3.2 Rear Panel Connectors

MKS 937B Operation Manual
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3 Feature and Control Locations
Power
OFF ON
A1
A2
B1
B2
C1
C2
937B GAUGE CONTROLLER
ESC
Enter
CP
AR
1.00E-10
1.00E-10
1.20E-03
3.50E-02
C2
Ctrl
F2
DG
C1
Ctrl
L
e
a
k
T
e
s
t
Torr
SP11
SP12
SP9
SP10
SP5
SP6
SP7
SP8
SP1
SP2
SP3
SP4
PR
N2
HC
N2
CC
N2
Remote
A1
AZ
B1
AZ
Channel
Setup
System
Setup
Pressure
Control
Degas
On/off
Sensor
On/Off
Beeper
Zero
Leak
Check
1 2 3 4 5
Figure 3-1 937B front Panel.
RS232/485
RELAY OUTOUT
Communication
ANALOG
AIO
Comm C B A
100 - 240 VAC 50/60 HZ 150 WATTS FUSE: 2.0 AT
6 7 9
10
8
11 12 13 14
15 16
COLD CATHODE
PIRANI
CAPACITANCE MANOMETER
Figure 3-2 937B rear panel.