MKS 937B - 9.7 MFC Control Commands; 9.8 Pressure (Valve) Control Commands

MKS 937B Operation Manual
92
9.7 MFC control commands
Command Parameter Response Function
QSFn
(n=1 to 6)
dd.dd
(d=0 to 9)
dd.dd
(d=0 to 9)
Query or set a scale factor for a MFC on Channel n.
Valid range is from 0.1 to 50.
RNGn
(n=1 to 6)
0.1 to
1E+6
0.1 to
1E+6
Query or set the full scale nominal range for a MFC.
Valid ranges are 0.1 to 1000000 sccm.
QZn
(n=1 to 6)
OK or NAK Zero a MFC on channel n. Execute only when flow
reading is less than 5% of full scale.
QSPn
(n=1 to 6)
d.dd Eee
(d,e=0 to 9)
d.dd Eee
(d,e=0 to 9)
Query and set the flow setpoint for a MFC on channel n.
If the channel is set to Setpoint mode, this is the true
flow rate set point.
If the channel is set to Pctrl mode, this is the startinf flow
rate for the MFC.
If the channel is set to RatioM or RatioA mode, this is
the setpoint for ratio control. The maximum setpoint
value is half of the full scale under the ratio control
mode.
QRC
d.dd Eee
(d,e=0 to 9)
d.dd Eee
(d,e=0 to 9)
Query the current ratio control parameter.
Set the ration control parameter when the QMODE is
set to RatioM.
The valid range is from 0 to 200 (%).
QMDn
(n=1 to 6)
Open,
Close,
Setpoint,
Open,
Close,
Setpoint,
Pctrl,
RatioA;
RatioM
Query or set the operation mode for a MFC on channel
n.
Table 9-9 937B MFC serial control commands.
9.8 Pressure (valve) control commands
Command Parameter Response Function
VTP 148,
248,
153
148,
248,
153
Query or set the type of valve connected to valve
control board.
VMD Open,
Close,
Hold,
Manual
Open,
Close,
Hold,
Manual,
Auto
Query or set the operation mode for the valve
connected to the pressure control board.
Table 9-10 937B pressure (valve) serial control commands.