MKS 937B Operation Manual
95
IU
ON or OFF ON or OFF Force the use of international pressure unit
(Pascal).
XDL
Erase the first page of the memory for preparing the
firmware downloading using Sam-BA after power
cycle of the controller.
Table 9-12 937B system commands.
Error code Meaning
151 NO GAUGE
152 NOT IONGAUGE
153 NOT HOTCATHODE
154 NOT COLDCATHODE
155 NOT CAPACITANCE MANOMETER
156 NOT PIRANI OR CTP
157 NOT PR OR CM
158 CM NO GAS TYPE
160 UNRECOGNIZED MSG
169 INVALID ARGUMENT
172 VALUE OUT OF RANGE
173 INVALID CTRL CHAN
175 CMD QUERY BYTE INVALID
177 NOT 485
178 CAL DISABLED
181 COMBINATION DISABLED
195 CONTROL SET POINT ENABLED
199 PRESSURE TOO HIGH FOR DEGAS
Table 9-13 937B serial communication error codes.
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