MKS 937B - 9.2 Pressure Reading Commands

MKS 937B Operation Manual
87
9.2 Pressure reading commands
Command Function Response Meaning
Single Channels
d.d0Eee
(d,e=0 to 9)
Pressure in selected units for PR, CP, CC & HC
d.dddEe
(d,e =0 to 9)
Pressure in selected units for CM
-d.ddEe
(d,e=0 to 9)
CM, when CM output is negative.
Gauge e(torr/mbar) e(Pascal) e(micron)
PR 4 2 1
CP 3 1 0
CC 11 9 8
LO<E-e
HC 10 8 7
ATM
PR when p>450 torr
OFF
Cold cathode HV is off, or HC/PR/CP power is off.
RP_OFF
HC and CC power is turned off from rear panel
control
WAIT
CC or HC startup delay
LowEmis
HC off due to low emission
CTRL_OFF
CC or HC is off in controlled state
PROT_OFF
CC or HC is off in protected state
PRn
(n=1 to 6)
Read pressure
on Channel n
MISCONN
Sensor improperly connected, or broken filament
(PR, CP only)
PRZ
Read
pressures on
all channel
6 of above,
separated by
spaces
Same as above
Combination Channels
d.d0Eee
(d,e=0 to 9)
Combined pressure in selected units
PCn
(n=1 or 2)
Read pressure
on channel n
and its
combination
sensor
NAK181
Combination disabled
Table 9-3 937B pressure reading commands.