MKS 937B Operation Manual
84
Set Combination Channel Parameter
Combo #1
Combo #2
High Middle Low
C2 B1 A1
NA NA NA
Enable
Disable
Enable
Figure 8-8 Setup screen for setting combination channel parameters.
Once the combination gauges have been properly selected, enable the combined analog output. If
invalid gauge channels are selected, the Enable parameter will stay in the Disabled mode.
The following rules may be used to simplify the gauge combination configuration.
The combination must include as least two pressure gauges.
NA is used as the parameter when no gauge is assigned
If an ion gauge (either cold cathode or hot cathode) is included in the combination, it must be
assigned as the low pressure range gauge (“Low” in Figure 8.8).
If a Pirani or Convection Pirani gauge is included in the combination, it must be assigned as
the middle pressure range gauge (“Middle” in Figure 8.8).
When a Pirani or Convection Pirani is used in combination, only an ion gauge is allowed to be
assigned as the low pressure range gauge.
Only capacitance manometer is allowed to be assigned as the high pressure range gauge.
Pay special attention to the selection of the controlling gauge for the ion gauge;
make sure that both gauges are connected to the same vacuum space at all times,
(make sure no valve is present between these gauges). If a valve between these two
gauges is closed, or if these gauges are connected to different vacuum chambers, it
may lead not only to bad combined pressure readings – it can also destroy an ion
gauge sensor.
Combination pressure settings can also be accomplished using following serial commands:
Query the pressure
@254PC1?;FF for corresponding pressure on combined Aout 1 and @254PC2?;FF for the
pressure on combined Aout 2.
Set the gauge combination
@254SPC1!HH,MM,LL;FF and @254SPC2!HH,MM,LL;FF . Here, HH, MM and LL are the
gauge channel (A1, A2, B1, B2, C1, C2, NA) corresponding to the gauge assigned to High,
Middle, and Low range pressure gauges.
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