MKS 937B - 14.2 MFC Gas Conversion Factors

MKS 937B Operation Manual
129
14.2 MFC gas conversion factors for selected gases
Gas Symbol Cp
Cal/g K)
Density
g/l @ 0
o
C
Conversi
on Factor
Ai
r
0.240 1.293 1.00
Ammonia NH
3
0.492 0.760 0.73
Ar
g
on A
r
0.1244 1.782 1.39
Arsine AsH
3
0.1167 3.478 0.67
Boron Trichloride BCl
3
0.1279 5.227 0.41
Bromine B
r
2
0.0539 7.130 0.81
Carbon Dioxide CO
2
0.2016 1.964 0.70
Carbon Monoxide CO 0.2488 1.250 1.00
Carbon Tetrachloride CCl
4
0.1655 6.86 0.31
Carbon Tetrafluoride
(
Freon 14
)
CF
4
0.1654 3.926 0.42
Chlorine Cl
2
0.1144 3.163 0.86
Chlorodifluoromethane
(
Freon 22
)
CHClF
2
0.1544 3.858 0.46
Chloro
p
entafluoroethane
(
Freon 115
)
C
2
ClF
5
0.164 6.892 0.24
Chlorotrifluoromethane
(
Freon 13
)
CClF
3
0.153 4.660 0.38
C
y
ano
g
en C
2
N
2
0.2613 2.322 0.61
Deuterium D
2
1.722 0.1799 1.00
Diborane B
2
H
6
0.508 1.235 0.44
Dibromodifluoromethane CB
r
2
F
2
0.15 9.362 0.19
Dichlorodifluoromethane
(
Freon 12
)
CCl
2
F
2
0.1432 5.395 0.35
Dichlorofluromethane
(
Freon 21
)
CHCl
2
F 0.140 4.592 0.42
Dichlorometh
y
silane
(
CH
3
)
2
SiCl
2
0.1882 5.785 0.25
Dichlorosilane SiH
2
Cl
2
0.150 4.506 0.40
1
,
2-Dichlorotetrafluoroethane
(
Freon 114
)
C
2
Cl
2
F
4
0.160 7.626 0.22
1
,
1-Difluoroeth
y
lene
(
Freon 1132A
)
C
2
H
2
F
2
0.224 2.857 0.43
2
,
2-Dimeth
y
l
p
ro
p
ane C
5
H
12
0.3914 3.219 0.22
Ethane C
2
H
6
0.4097 1.342 0.50
Fluorine F
2
0.1873 1.695 0.98
Fluoroform
(
Freon 23
)
CHF
3
0.176 3.127 0.50
Freon 11 CCl
3
F 0.1357 6.129 0.33
Freon 12 CCl
2
F
2
0.1432 5.395 0.35
Freon 13 CClF
3
0.153 4.660 0.38
Freon 13B1 CBrF
3
0.1113 6.644 0.37
Freon 14 CF
4
0.1654 3.926 0.42
Freon 21 CHCl
2
F 0.140 4.592 0.42
Freon 22 CHClF
2
0.1544 3.858 0.46
Freon 23 CHF
3
0.176 3.127 0.50
Freon 113 C
2
Cl
2
F
3
0.161 8.360 0.20