MKS 937B - 9.6 Hot Cathode Control Commands

MKS 937B Operation Manual
91
9.6 Hot cathode control commands
Command Parameter Response Function
PROn
(n=1, 3, 5)
d.dd Eee
(d,e=0 to 9)
d.dd Eee
(d,e=0 to 9)
Query or set protection setpoint value for ion gauge for
channel n. The valid PRO range is 1x10
-5
to 1x10
-2
torr.
Default value is 5x10
-3
torr.
CSPn
(n=1, 3, 5)
d.dd Eee
(d,e=0 to 9)
d.dd Eee
(d,e=0 to 9)
Query and set control setpoint value for an ion gauge on
channel n. Valid CSP range is 5x10
-4
to 1x10
-2
torr for
Pirani, and is 2x10
-3
to 1x10
-2
torr for convention Pirani.
XSPn
(n=1, 3, 5)
ON or OFF ON or OFF Extend the upper control setpoint range from 1x10
-2
torr
to 9.5x10
-1
torr.
CHPn
(n=1, 3, 5)
d.dd Eee
(d,e=0 to 9)
d.dd Eee
(d,e=0 to 9)
Query and set control setpoint hysteresis value for an
ion gauge on channel n. Valid CHP range is 5.5x10
-4
to
1.1x10
-2
torr for Pirani, and is 2.2x10
-3
to 1.1x10
-2
torr
for convention Pirani. Default value is 1.5X the control
setpoint value.
CSEn
(n=1, 3, 5)
A1, B1,
A2, B2,
C1, C2,
OFF
A1, B1,
A2, B2,
C1, C2,
OFF
Query, enable/disable the control channel status for an
ion gauge on channel n.
CTLn
(n=1, 3, 5)
AUTO,
SAFE,
OFF
AUTO,
SAFE,
OFF
AUTO: ion gauge can be turned on & off by the
controlling gauge (PR/CP). SAFE, ion gauge can be
turned off, but, not be turned on by the controlling
gauge. If no PR/CP exists, this function can not be
enabled.
AFn
(n=1,3, 5)
1 or 2 1 or 2
Query or set active filament for HC.
ECn
(n=1,3, 5)
20UA
100UA
AUTO20
AUTO100
20UA
100UA
AUTO20
AUTO100
Query or set emission current.
GCn
(n=1,3, 5)
dd.d
(d=0 to 9)
dd.d
(d=0 to 9)
Query or set a gas correction factor for a HC gauge on
Channel n. Valid range is from 0.1 to 50.
CPn
(n=1,3, 5)
ON or OFF ON or OFF Query the channel power status for PR, CP, HC or high
voltage status for CC.
Turn on/off the channel power for PR, CP, HC, or high
voltage for CC).
SENn
(n=1,3, 5)
dd.d
(d=0 to 9)
dd.d
(d=0 to 9)
Query or set a gas sensitivity for a HC gauge on
Channel n. Valid range is from 1 to 50.
DGn
(n=1,3, 5)
ON or OFF ON or OFF Query the HC degas status
Turn on/off degas
DGTn
(n=1,3, 5)
d
(d=5-240)
6
(d=5-240)
Query and set the HC degas time.
GTn
(n=1,3, 5)
Nitrogen
Argon
Helium
Nitrogen
Argon
Helium
Query or set a gas type for HC/CC on channel n.
Ion gauge status query.
Tn
(n=1,3, 5)
W, O, P, D,
C, R, F, N
W = WAIT
O = OFF
P = PROTECT
D = DEGAS
C = Control
R = Rear panel Ctrl off
F = HC filament fault
N = No gauge
XRLn
(n=1,3,5)
d.dd Eee
(d,e=0 to 9)
d.dd Eee
(d,e=0 to 9)
Query or set the X-ray limit for a HC sensor. The valid
range is from 0 to 1X10
-9
torr.
Table 9-8 937B cold and hot cathode control commands.