MKS 937B - Table 8-6 Buffered Analog Output for the 315;345 Pirani Sensors

MKS 937B Operation Manual
77
Pressure, Torr Buffered N
2
Vout, V Buffered Ar Vout, V Buffered He Vout, V
1.0E-04 0.6323 0.6324 0.6340
1.5E-04 0.6347 0.6339 0.6362
2.0E-04 0.6372 0.6355 0.6384
3.0E-04 0.6420 0.6385 0.6426
4.0E-04 0.6468 0.6414 0.6469
6.0E-04 0.6563 0.6474 0.6553
8.0E-04 0.6656 0.6533 0.6636
1.0E-03 0.6747 0.6591 0.6718
1.5E-03 0.6970 0.6734 0.6919
2.0E-03 0.7185 0.6875 0.7115
3.0E-03 0.7597 0.7147 0.7490
4.0E-03 0.7985 0.7408 0.7847
6.0E-03 0.8707 0.7905 0.8517
8.0E-03 0.9371 0.8371 0.9138
1.0E-02 0.9988 0.8812 0.9718
1.5E-02 1.1376 0.9824 1.1036
2.0E-02 1.2602 1.0735 1.2211
3.0E-02 1.4727 1.2344 1.4271
4.0E-02 1.6557 1.3751 1.6066
6.0E-02 1.9652 1.6162 1.9148
8.0E-02 2.2254 1.8213 2.1788
1.0E-01 2.4526 2.0015 2.4131
1.5E-01 2.9255 2.3794 2.9143
2.0E-01 3.3095 2.6885 3.3370
3.0E-01 3.9177 3.1815 4.0419
4.0E-01 4.3922 3.5686 4.6294
6.0E-01 5.1070 4.1556 5.5955
8.0E-01 5.6323 4.5898 6.3873
1.0E+00 6.0405 4.9289 7.0651
1.5E+00 6.7597 5.5295 8.4399
2.0E+00 7.2342 5.9282 9.5215
3.0E+00 7.8281 6.4295 11.1701
4.0E+00 8.1874 6.7340
6.0E+00 8.6026 7.0869
8.0E+00 8.8363 7.2858
1.0E+01 8.9862 7.4136
1.5E+01 9.1992 7.5950
2.0E+01 9.3119 7.6909
3.0E+01 9.4294 7.7908
4.0E+01 9.4846 7.8398
6.0E+01 9.5377 7.8835
8.0E+01 9.5638 7.9034
1.0E+02 9.5795 7.9149
1.5E+02 9.6017 7.9306
2.0E+02 9.6146 7.9400
3.0E+02 9.6319 7.9539
4.0E+02 9.6454 7.9664
6.0E+02 9.6693 7.9922
8.0E+02 9.6925 8.0200
1.0E+03 9.7157 8.0502
Table 8-6 Buffered analog output for the 315/345 Pirani sensors.