Name: MKS 649A
Brand: MKS
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121004-P1

Rev A, 11/97

Instruction Manual

MKS Type 649A

Pressure Controller

with an Integral Mass Flow Meter

Six Shattuck Road

Andover, MA 01810-2449

(800) 227-8766 or (978) 975-2350

Fax: (978) 975-0093

E-mail: mks@mksinst.com

Web site: http://www.mksinst.com

Table of Contents5
Safety Information13
Symbols Used in this Instruction Manual13
Symbols Found on the Unit14
Table 1: Definition of Symbols Found on the Unit14
Chapter One: General Information17
Introduction17
Design Features of the Integral Mass Flow Meter17
Cleanliness Features18
How this Manual Is Organized18
Manual Conventions18
Customer Support19
Chapter Two: Installation21
How to Unpack the Type 649 Unit21
Opening the Package21
Unpacking Checklist22
Interface Cables23
Generic Shielded Cable Description23
Product Location and Requirements24
Dimensions25
Front and Back Views25
Figure 1: Front View of the Type 649 Controller25
Side View26
Figure 2: Back View of the Type 649 Controller26
Figure 3: Side View (Inlet) of the Type 649 Controller26
Bottom View27
Figure 4: Bottom View of the Type 649 Controller27
Setup28
Fittings28
Mounting Hardware28
Gas Pressure28
Installing the Unit29
Figure 5: Downstream Pressure Control29
Electrical Information30
I/O Connector30
Table 2: I/O Connector Pinout30
Initial Configuration32
Table 3: Initial Configuration32
Chapter Three: Overview33
General Information33
Pressure Control Range33
Figure 6: Top View of the Type 649 Controller33
Flow Range34
A Typical Control System34
Figure 7: Location of the Mass Flow Meter Adjustments34
How the 649 Pressure Controller Works35
Flow Measurement Overview36
Flow Path36
Measurement Technique36
Tuning the 649 Pressure Controller37
Proportional Term37
Figure 8: Effects of the Proportional Control37
Integral Term38
Figure 9: Effects of the Integral Control38
Tuning the 649 Controller39
Figure 10: Controller Response with Initial P Term and I Term Values39
Figure 11: Controller Response with Increased P Term40
Figure 12: Controller Response with Increased I Term40
Priority of Commands41
Trip Points42
Action of the Trip Points42
Applications with a Large Differential Pressure43
Labels43
Figure 13: Serial Number Label43
The Gas Correction Factor (GCF) for Flow Metering44
Chapter Four: Operation45
How to Check the Pressure Transducer Zero45
How to Adjust the Pressure Transducer Span46
Table 4: Highest Pressure for Zero Adjustment of the Pressure Transducer46
How to Zero the Integral Mass Flow Meter47
How to Tune the 649 Controller48
How to Adjust the Trip Point Values49
How to Select the Trip Point Action50
Figure 14: Jumper Positions on the Transducer Board51
How to Use Trip Points as Error Indicators52
How to Change the Pressure Output Signal Range53
Chapter Five: Maintenance55
General Information55
Zero Adjustment55
Appendix A: Product Specifications57
Performance Specifications57
Physical Specifications58
Environmental Specifications59
Trip Point Specifications59
Appendix B: Model Code Explanation61
Model Code61
Appendix C: Valve Orifice Selection65
General Information65
Checking the Valve Orifice Size65
Table 5: Valve Orifice Size65
How to Verify the Orifice Selection66
Table 6: Valve Orifice Index Number66
Figure 15: Flow Range Selection67
Using Different Gases68
Appendix D: Gas Correction Factors71
Index75

MKS 649A User Manual

Table of Contents

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MKS 649A Specifications

Related product manuals

Brand	MKS
Model	649A
Category	Controller
Language	English