EasyManua.ls Logo

MKS 649A - Table of Contents

MKS 649A
76 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
Table of Contents
iii
Table of Contents
Safety Information.................................................................................................................. 1
Symbols Used in This Instruction Manual.................................................................. 1
Symbols Found on the Unit ....................................................................................... 2
Chapter One: General Information......................................................................................... 5
Introduction ............................................................................................................... 5
Design Features of the Integral Mass Flow Meter.......................................... 5
Cleanliness Features...................................................................................... 6
How This Manual is Organized.................................................................................. 6
Manual Conventions ..................................................................................... 6
Customer Support...................................................................................................... 7
Chapter Two: Installation......................................................................................................9
How To Unpack the Type 649 Unit ........................................................................... 9
Opening the Package..................................................................................... 9
Unpacking Checklist ..................................................................................... 10
Interface Cables ......................................................................................................... 11
Generic Shielded Cable Description .............................................................. 11
Product Location and Requirements........................................................................... 12
Dimensions................................................................................................................ 13
Front and Back Views................................................................................... 13
Side View ..................................................................................................... 14
Bottom View................................................................................................. 15
Setup ......................................................................................................................... 16
Fittings.......................................................................................................... 16
Mounting Hardware ...................................................................................... 16
Gas Pressure.................................................................................................. 16
Installing the Unit.......................................................................................... 17
Electrical Information................................................................................................ 18
I/O Connector................................................................................................ 18
Initial Configuration .................................................................................................. 20

Table of Contents