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MKS GE50A User Manual

MKS GE50A
113 pages
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1046210-001, Rev A
January, 2013
MKS G-Series
Digital
Mass Flow Controllers
Instruction Manual

Table of Contents

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MKS GE50A Specifications

General IconGeneral
ModelMKS GE50A
Type3D Printer Controller Board
FirmwareMarlin
Supported Stepper DriversA4988, DRV8825
Motor Control5 stepper motor drivers
Communication InterfaceUSB, UART, SPI

Summary

Warranty Information

Mass Flow Device Safety Information

Safety Procedures and Precautions

General safety precautions to be observed during all phases of instrument operation.

Chapter Two: Overview

Flow Measurement Overview

Explains how the MFC measures mass flow rate and its accuracy.

Measurement Technique

Explains the differential heat transfer principle used for flow measurement.

How the MFC Works

Explains the operational principle of the MFC, including control circuitry and valve.

Operation of the MFC with Gases other than Nitrogen

Describes how to configure the MFC for gases other than Nitrogen using pre-stored parameters.

Chapter Three: Installation and Configuration

Product Location and Requirements

Details ventilation, operating temperature, power, and storage requirements for the MFC.

Mounting Hardware

Information on mounting hardware and procedures for GE50A, GM50A, and GV50A MFCs.

Installation Procedure

Step-by-step guide for installing the MFC, including connections and power.

Chapter Four: Analog and Digital Interfaces

Chapter Five: Ethernet Interface Setup and Configuration

Step 2: Setup Network for Communication through Ethernet

Provides three options for setting up network communication via Ethernet.

Chapter Six: Embedded Web-Based GUI and Diagnostics

Setup Mode

Zeroing the MFC

Details the procedure to press the "Zero Flow" button to zero the MFC.

Chapter Seven: Maintenance

Flow Zero Adjustment

Recommended intervals and methods for adjusting the MFC flow zero.

Chapter Eight: Troubleshooting

Troubleshooting Chart

A chart listing common symptoms, their possible causes, and corrective actions.

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