MKS GE50A - Table 12 A: Profibus 9 Pin D Male Power Connector- Model Code 4

Digital Interface Input and Output Options Chapter Four: Analog and Digital Interfaces
37
After installation and power connection, allow the MKS MFC to warm up for a minimum of 30 minutes.
This is to account for both warm-up of the device electronics as well as for the device to reach ambient
temperature conditions.
Zeroing the Device
Although MKS flow devices are zeroed at the factory prior to shipment, it is normal to check the zero and re-
zero them, if needed, when they are first installed on the tool.
A mass flow meter or mass flow device will provide a zero output signal under no flow gas conditions.
Zero offset from improper zeroing procedures can contribute to flow measurement inaccuracy. This is more
apparent at the lower end of the device flow range.
In order to complete a true zeroing of the device, ensure the following conditions are satisfied prior to
beginning the procedure.
 Device is installed in the orientation intended for final use (i.e. horizontal base down, vertical flow up,
etc.).
 Device is powered at operating temperature, preferably for 30 or more minutes.
 Devices subject to ambient temperatures other than room temperature (23º C) should be zeroed under
those conditions.
 Pressure drop and flow across the device is reduced to zero. Depending on the gas panel configuration,
this may be done by one of the referenced procedures. See Chapter 7 Maintenance for zeroing procedures.
Profibus Digital Interface Using Two 9 Pin D Connectors
The Profibus MFC has two 9 pin D connectors. A 9 pin D males (Table 12 A) that provides power to the
device and a 9 pin D female (Table 12 B) which provides the communications interface with the Profibus
master slave network, electrical power from the network bus.
The G-SERIES (G-SERIES) MFC Profibus Mass Flow Device connector, switches and initial power up are
described in this section. For a complete functional description of the MFC Mass Flow device along with the
MKS G-Series MFC, Profibus Supplement, 1046413-001. Please contact MKS for this document.
Table 12A: Profibus 9 Pin D Male Power Connector– Model Code 4
Power Connector – 9 pin D male
Pin 1 Valve Open/Close: Apply +5 to+15 VDC to
Open; Pull to ground or apply -5 to -15 VDC
to Close.
Pin 2 No Connection
Pin 3 11 to 25 VDC Supply
Pin 4 No Connection
Pin 5 Power Common
Pin 6 No Connection
Pin 7 No Connection
Pin 8 No Connection
Pin 9 No Connection