Appendix A: Product Specifications Performance Specifications – GE50A/GV50A/GM50A
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Appendix A: Product Specifications
Performance Specifications – GE50A/GV50A/GM50A
GE50A, GV50A – Elastomer Sealed GM50A – Metal Sealed
Full Scale Flow (N2 equivalent) 10-50000 sccm 10-50000 sccm
Maximum Inlet Pressure 150 psig, limited to maximum differential
pressure across MFC.
150 psig, limited to maximum differential
pressure across MFC.
Normal Operating Pressure
Differential (with atmospheric
pressure at the MFC outlet)
10 to 5000 sccm, 10 to 40 psid
10000 to 20000 sccm 15 to 40 psid
30000 to 50000 sccm 25 to 40 psid
10 to 5000 sccm, 10 to 40 psid
10000 to 20000 sccm 15 to 40 psid
30000 to 50000 sccm 25 to 40 psid
Proof Pressure 1000 psig 1000 psig
Burst Pressure 1500 psig 1500 psig
Control Range 2% to 100% of F.S. 2% to 100% of F.S.
Accuracy
1% of setpoint for > 20 to 100% F.S.
0.2% of FS for 2 to 20% F.S.
1% of setpoint for > 20 to 100% F.S.
0.2% of FS for 2 to 20% F.S.
Repeatability
0.3% of Reading 0.3% of Reading
Resolution 0.1% of Full Scale 0.1% of Full Scale
Temperature Coefficients
Zero
Span
<0.05% F.S./C
<0.08% Reading/C
<0.05% F.S./C
<0.08% Reading/C
Inlet Pressure Coefficient < 0.02% of Reading./psi < 0.02% of Reading./psi
Typical Controller Settling Time
(per SEMI Guideline E17-0600)
< 750 milliseconds (typical above 5% F.S.) < 750 milliseconds (typical above 5% F.S.)
Warm-Up Time
(to within 0.2% of F.S. of steady
state performance)
< 30 min. < 30 min.
Normal Operating Temperature
Range
10C to 50C 10C to 50C
Storage Humidity 0 to 95% Relative Humidity, non-
condensing
0 to 95% Relative Humidity, non-
condensing
Storage Temperature
-20C to 65C (-4F to 149F) -20C to 65C (-4F to 149F)
ROHS Compliant Yes Yes
Electromagnetic Compatibility CE Compliant 2004/108/EC CE Compliant 2004/108/EC
Specifications are subject to change without notice.
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