MKS GE50A - Appendix B: Model Code Explanation for GE50 A & GV50 A; Model Code Description - Elastomer Sealed Products

Model Code Description – Elastomer Sealed Products Appendix B : Model Code Explanation for GE50A & GV50A
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Appendix B : Model Code Explanation for GE50A & GV50A
Model Code Description – Elastomer Sealed Products
The model code of the MFC defines features of the unit such as device type, flow range, fittings, valve
configuration, connector type, seal material and firmware revision.
CCCCC GGG FFF Y W Z S VV
Configuration Code
Gas Code
Flow Range Full Scale
Fittings
Connector Type
Seal Type
Reserved For MKS Future Use
Firmware Version
Configuration Code (CCCCC)
Type GE50A Elastomer Sealed Mass Flow Controller: CCCCC = GE50A
Type GV50A Elastomer Sealed Mass Flow Controller with Integral Shut-off Valve: CCCCC = GV50A
Gas Code (GGG)
Gas codes are in accordance with SEMI Guideline E52, Practice for Referencing Gases and Gas Mixtures
Used in Digital Mass Flow Controllers. If the gas or gas mixture sought is not found in the list below, conult
MKS Applications Engineering for assistance.
Gas Code Symbol
Acetone 184 C3H6O
Acetylene 042 C2H2
Air 008 Air
Allene 066 C3H4
Ammonia 029 NH3
Argon 004 Ar
Arsine 035 AsH3
Boron Trichloride 070 BCl3
Boron Trifluoride 048 BF3
Bromine 021 Br2
Bromine Pentafluoride 116 BrF5
Bromine Trifluoride 076 BrF3
Bromotrifluoromethane (R-13b1) 080 CBrF3
Butane 117 C4H10