Introduction Chapter One: General Information
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Chapter One: General Information
Introduction
MKS Instruments G-Series MFCs represent state-of-the-art technology meeting the advanced process
requirements of next generation toolsets. These devices integrate thermal sensor technology together with a
MKS real-time feedback control system providing typical flow control response times of 600 to 800
milliseconds with a normally closed valve. There are three device types in the G-Series MFC product line.
GE50A – elastomer sealed MFC
GM50A – metal sealed MFC
GV50A – elastomer sealed MFC with integral downstream shut-off valve
The G-SERIES MFC are available with full scale flow ranges of 10 sccm to 50 slm (N2 equivalent) in a
standard 1.5” wide form factor with a variety of fitting types. Digital I/O options for Devicenet, Profibus and
RS485 are available. All devices include an embedded, web-based user interface.
Design Features
Increases Throughput and Performance
1% of setpoint accuracy for the calibration gas.
Enables better chamber matching through tight MFC accuracy.
Includes embedded diagnostics software that allows users to check MFC functionality without
removing the MFC.
Increases tool uptime through reduction of “No Problem Found” MFC replacements.
Reduce Overall Costs
Over 90 selectable gases stored on the MFC.
Reduces MFC inventory through multi-gas, multi-range availability.
Minimizes overall footprint of gas delivery module.
Easy to Integrate and Operate
Straightforward configuration and diagnostics through Ethernet user interface which uses a standard
web browser (e.g. IE8 or Firefox) – no special software required.
The design of these MFCs incorporates an advanced flow sensor, a control valve, and an optimized bypass.
The latest generation two-element sensing circuit provides accurate, repeatable performance even in low flow
ranges (< 10 sccm). A low temperature effect from ambient temperature change and minimal attitude
sensitivity effect are also ensured. The optimized sensor/bypass arrangement minimizes the flow splitting
error for gases with different properties, which dramatically improves measurement accuracy when gases
other than the calibration gas are used.
Control (I/O) Interfaces
These G-Series MFCs are available with either a digital or analog (future) interface I/O which is specified by
the user at time of ordering.
The digital control I/O may be via RS485, DeviceNet or Profibus protocol. An overview of each along with
connector, power supply and switch information is included in Chapter 4 of this manual. Protocol specifics
(profile) are included in separate documentation available from MKS.
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