List of References
v
List of References
The documents listed below are referenced throughout this manual.
[1] “DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol”, Open
DeviceNet Vendors Association, Inc. Release 2.0. ERRATA 4.0
[2] “DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library”, Open DeviceNet
Vendors Association, Inc. Release 2.0. ERRATA 4.0
[3] “Sensor/Actuator Network Common Device Model”, SEMI Standards Document E54.1-0097.
[4] “Sensor/Actuator Network Communications Standard for DeviceNet”, SEMI Standards Draft
Document E54.4-0097.
[5] “Sensor/Actuator Network Specific Device Model for Mass Flow Devices”, SEMI Standards Draft
Document #2253C.
[6] “Sensor/Actuator Network Standard”, SEMI Standards Document E54-0097.
[7] SEMI E17-00-0060 Guideline for Mass Flow Controller Transient Characteristics Tests
[8] SEMI E18-00-0091. Guideline for Temperature Specifications of the Mass Flow Controller
[9] SEMI E27-00-0092. Standard for Mass Flow Controller and Mass Flow Meter Linearity
[10] SEMI E28-00-0092. Guideline for Pressure Specifications of the Mass Flow Controller
[11] SEMI E56-00-1296. Test Method for Determining Accuracy, Linearity, Repeatability, Short Term
Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers
[12] SEMI Standards Document E52-95.
[13] SEMI E80-00-0299. Test Method Determining Attitude Sensitivity of Mass Flow Controllers
[14] SEMI Standards Document E52-95. Practice for Referencing Gases and Gas Mixtures Used in Digital
Mass Flow Controllers
[15] Instruction Manual, G-Series MFC, RS845 Supplement
[16] Instruction Manual, G-Series MFC, DeviceNet Supplement
[17] Instruction Manual, G-Series MFC, Profibus Supplement
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