MKS GE50A User Manual

Specifications are subject to change without notice.
Mechanical Specifications - GE50A/GV50A/GM50A
Appendix A: Product Specifications
80
Mechanical Specifications - GE50A/GV50A/GM50A
GE50A, GV50A – Elastomer Sealed GM50A – Metal Sealed
Fittings (compatible with) ¼” Swagelok, 4 VCR, 4 VCO ¼” Swagelok, 4 VCR, 1-1/2” surface mount
(C-seal, W-seal)
Leak Integrity
External (scc/sec He)
Through closed valve
Through shut-off valve
< 1 x 10
-9
< 0.1% for F.S. at 40 psig inlet to atmos.
<4x 10-09 atm-cc/sec He
< 1 x 10
-10
< 1% for F.S. at 40 psig inlet to atmos.
Not Applicable
Wetted Materials
Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ
for semiconductor quality), 316 S.S. ,
Elgiloy, Nickel, 430FR
316L S.S. VAR (equivalent to 316 S.S. SCQ
for semiconductor quality), 316 S.S. ,
Elgiloy, KM-45, PTFE
Seals (select option) Viton, Buna, or Neoprene Stainless Steel
Surface Finish
16 inches, average Ra 10

inches, average Ra, Electropolished
Weight ≤ 3 lbs (1.4 kg) ≤ 3 lbs (1.4 kg)
Electrical Specifications for GE50A, GM50A and GV50A
Analog I/O
Input Voltage Required
Max current at start-up (first 5 sec.)
Typical current at steady state
+15 to +25 VDC
15VDC (±5 %) @ TBD mA
15VDC (±5 %) @ TBD mA
Set Point Command Signal 0 to 5 VDC
Flow Output Signal 0 to 5 VDC (into high impedance load, minimum 10K-ohm)
Output Impedance
< 1 Ω
Connectors
15-pin Type “D”, 9-pin Type “D”
Digital I/O (DeviceNet)
Input Voltage
Max current at start-up (first 5 sec.)
Typical current at steady state
+11 to +25 VDC
15VDC (±5 %) @ 350 mA
15VDC (±5 %) @ 280 mA
Data Rate/Network Length
Date Rate (User selectable)
125 Kbps, 500 m (1,640 ft)
250 Kbps, 250m (820 ft)
500 Kbps, 100m (328 ft)
Level of Filtering
User software adjustable
Digital Functions (flow) Select units: counts, slm, sccm % of F.S.
Remote Zero

MKS GE50A Specifications

General

Brand	MKS
Model	GE50A
Category	Controller
Language	English