Operation of the MFC with Gases other than Nitrogen Chapter Two: Overview
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When a gas other than the calibration gas is selected by the user, the MFC automatically pulls up the correct
gas correction factor (GCF) to determine the flow of that gas with respect to the original N
2
calibration. For
light gases such as helium and hydrogen, additional parameters are utilized to correct for the inherent
nonlinear response between Nitrogen and these gases.
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