MKS GE50A - How the MFC Works; Operation of the MFC with Gases other than Nitrogen

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Table of Contents5
List of References9
Mass Flow Device Safety Information11
Symbols Used in this Instruction Manual11
Symbols Found on the Unit11
Safety Procedures and Precautions11
Table 1: Definition of Symbols Found on the Unit11
Sicherheitshinweise für das Massenflussgerät13
In dieser Betriebsanleitung Vorkommende Symbole13
Erklärung der am Gerät Angebrachten Symbole13
Sicherheitsvorschriften und Vorsichtsmaßnahmen13
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole13
Informations de Sécurité Pour Appareils de Mesure/Contrôle de Débit Massique15
Symboles Utilisés Dans Ce Manuel D'utilisation15
Symboles Figurant Sur L'unité15
Mesures de Sécurité Et Précautions15
Tableau 3: Définition des Symboles Sur L'unité15
Medidas de Seguridad del Dispositivo de Flujo de Masa17
Símbolos Usados en Este Manual de Instrucciones17
Símbolos Hallados en la Unidad17
Procedimientos y Precauciones de Seguridad17
Tabla 4: Definición de Los Símbolos Hallados en la Unidad17
マスフロー機器の安全に関する情報19
本取扱説明書のマーク19
本機器のマーク19
表 5: 本機器に使⽤されているマークについて19
安全対策について20
질량 유량 장치 안전 정보23
본 지침 매뉴얼에 사용되는 기호들23
장치에 표시된 기호들23
표 6: 장치에 표시된 기호들의 정의23
안전 절차 및 예방조치24
Chapter One: General Information27
Introduction27
How this Manual Is Organized28
Customer Support29
Chapter Two: Overview31
General Information31
How the MFC Works32
Operation of the MFC with Gases Other than Nitrogen32
Chapter Three: Installation and Configuration34
Unpacking34
Product Location and Requirements35
Product Dimensions35
GE50A and GM50A - See Appendix C35
GV50A - See Appendix D35
Mounting Hardware36
Installation Procedure36
Figure 1: Serial Number Label (Sample)36
Chapter Four: Analog and Digital Interfaces39
Analog I/O Interface Cables39
Table 7: MKS Interface Cables39
Analog Interface Input and Output Options40
Table 8: Analog Interface Voltage I/O (0 to 5 VDC) - 9 Pin D Male Pinouts - Model Code a40
Table 9: Analog Interface Voltage I/O (0 to 5 VDC) - 15 Pin D Male Pinouts - Model Code B41
Digital Interface Input and Output Options43
Figure 2: Devicenet Connector Pin Diagram43
Table 10: Digital Interface - Devicenet Connector Pinout - Model Code 643
Figure 3: Devicenet Top View44
Table 11: Network (NET) Status LED Indicators44
Figure 4: Devicenet Baud Rate Switch45
Figure 5: Devicenet MAC ID Switches45
Table 12A: Profibus 9 Pin D Male Power Connector- Model Code 447
Figure 6: Profibus Top View48
Table 12B: Profibus 9 Pin D Female Communications Connector - Model Code 448
Figure 7: Profibus Station Address Switches49
Table 13: Digital Interface - RS485 Using 9 Pin D - Model Code 550
Table 14: RS485 Module Status LED Indicators50
Figure 8: RS485 Top View51
Chapter Five: Ethernet Interface Setup and Configuration54
Step 1: Install the Java™ Plug-In (for Single IP Address)54
Step 2: Setup Network for Communication through Ethernet55
Chapter Six: Embedded Web-Based GUI and Diagnostics64
Logging on to Your MFC64
Monitor Mode64
Figure 9: Embedded GUI, MFC Device Page in Monitor Mode65
Figure 10: Embedded GUI, Plot Page in Monitor Mode66
Figure 11: Embedded GUI, Configuration Page in Monitor Mode67
Figure 12: Embedded GUI, RS485 Comm Page in Monitor Mode68
Setup Mode69
Figure 13: Setup Mode (Configuration Page)69
Figure 14: Embedded GUI, Device Page in Setup Mode70
Figure 15: Embedded GUI, Creating a New Gas Instance71
Figure 16: Changing the Full Scale Flow Range71
Figure 17: Embedded GUI, Plot Page in Setup Mode72
Figure 18: Embedded GUI, Configuration Page in Setup Mode73
Figure 19: Embedded GUI, RS485 Comm Page in Setup Mode75
Figure 20: Embedded GUI, Diagnostics Page in Setup Mode76
Chapter Seven: Maintenance78
General Information78
Recalibration78
Flow Zero Adjustment78
Chapter Eight: Troubleshooting83
Troubleshooting Chart83
Table 15: Troubleshooting Chart83
Appendix A: Product Specifications89
Performance Specifications - GE50A/GV50A/GM50A89
Specifications Are Subject to Change Without Notice.mechanical Specifications - GE50A/GV50A/GM50A89
Electrical Specifications for GE50A, GM50A and GV50A90
Appendix B : Model Code Explanation for GE50A & GV50A94
Model Code Description - Elastomer Sealed Products94
Appendix C: Model Code Explanation for GM50A100
Model Code Description - GM50A - Metal Sealed Products100
Appendix D : Outline Drawings106
GE50A MFC and GM50A MFC/MFM106
GV50A MFC W/ Integral Shut-Off Valve109
Appendix D: Health and Safety Form112

MKS GE50A - How the MFC Works; Operation of the MFC with Gases other than Nitrogen

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