MKS 937B - Page 130

MKS 937B Operation Manual
130
Freon 114 C
2
Cl
2
F
4
0.160 7.626 0.22
Freon 115 C
2
ClF
5
0.164 6.892 0.24
Freon 116 C
2
F
6
0.1843 6.157 0.24
Freon C318 C
4
F
8
0.1866 8.93 0.164
Freon 1132A C
2
H
2
F
2
0.224 2.857 0.43
Helium He 1.241 0.1786 1.45
Hexafluoroethane
(
Freon 116
)
C
2
F
6
0.1843 6.157 0.24
H
y
dro
g
en H
2
3.419 0.0899 1.01
H
y
dro
g
en Bromide HB
r
0.0861 3.610 1.00
H
y
dro
g
en Chloride HCl 0.1912 1.627 1.00
H
y
dro
g
en Fluoride HF 0.3479 0.893 1.00
Isobut
y
lene C
4
H
8
0.3701 2.503 0.29
Kr
yp
ton K
r
0.0593 3.739 1.543
Methane CH
4
0.5328 0.715 0.72
Meth
y
l Fluoride CH
3
F 0.3221 1.518 0.56
Mol
y
bdenum Hexafluoride MoF
6
0.1373 9.366 0.21
Neon Ne 0.246 0.900 1.46
Nitric Oxide NO 0.2328 1.339 0.99
Nitro
g
en N
2
0.2485 1.250 1.00
Nitro
g
en Dioxide NO
2
0.1933 2.052 **
Nitro
g
en Trifluoride NF
3
0.1797 3.168 0.48
Nitrous Oxide N
2
O 0.2088 1.964 0.71
Octafluoroc
y
clobutane
(
Freon C318
)
C
4
F
8
0.1866 8.93 0.164
Ox
yg
en O
2
0.2193 1.427 0.993
Pentane C
5
H
12
0.398 3.219 0.21
Perfluoro
p
ro
p
ane C
3
F
8
0.194 8.388 0.17
Phos
g
ene COCl
2
0.1394 4.418 0.44
Phos
p
hine PH
3
0.2374 1.517 0.76
Pro
p
ane C
3
H
8
0.3885 1.967 0.36
Pro
py
lene C
3
H
6
0.3541 1.877 0.41
Silane SiH
4
0.3189 1.433 0.60
Silicon Tetrachloride SiCl
4
0.1270 7.580 0.28
Silicon Tetrafluoride SiF
4
0.1691 4.643 0.35
Sulfur Dioxide SO
2
0.1488 2.858 0.69
Sulfur Hexafluoride SF
6
0.1592 6.516 0.26
Trichlorofluoromethane
(
Freon 11
)
CCl
3
F 0.1357 6.129 0.33
Trichlorosilane SiHCl
3
0.1380 6.043 0.33
1
,
1
,
2 Trichloro-1
,
2
,
2
,
-Trifluoroethane
(
Freon 113
)
C
2
Cl
3
F
3
0.161 8.360 0.20
Tun
g
sten Hexafluoride WF
6
0.0810 13.28 0.25
Xenon Xe 0.0378 5.858 1.32
** Consult MKS Instruments
Note: Standard pressure is defined as 760 torr (mmHg). Standard temperature is defined as 0
o
C.