MKS 937B - 9.9 PID Recipe Commands

MKS 937B Operation Manual
93
9.9 PID Recipe commands
Command Parameter Response Function
RCP n
(n=1 to 8)
n
(n=1 to 8)
Set or query the active recipe number.
RDCH A1, B1, A2,
B2, C1, C2,
Rat, Vlv
n:CH
(n=1 to 8,
CH=A1, A2,
B1, B2, C1, C2,
Rat, Vlv, NA)
Set or query the device channel for PID pressure
control associated with current active recipe n.
RPCH A1, B1, A2,
B2, C1, C2,
PC1, PC2
n:CH
(n=1 to 8,
CH=A1, A2,
B1, B2, C1, C2,
PC1, PC2, NA)
Set or query the pressure channel for PID pressure
control associated with current active recipe n.
RPSP
d.dd Eee
(d,e=0 to 9)
n:d.dd Eee
(n=1 to 8)
(d,e=0 to 9)
Set or query the pressure setpoint for PID pressure
control associated with current active recipe n.
RP
d.dd Eee
(d,e=0 to 9)
n:d.dd Eee
(n=1 to 8)
(d,e=0 to 9)
Set or query the proportional control parameter for
PID pressure control associated with current active
recipe n.
Valid rage is from 0.002 to 10000, default setting is
10.
RI
d.dd Eee
(d,e=0 to 9)
n:d.dd Eee
(n=1 to 8)
(d,e=0 to 9)
Set or query the Integral control parameter for PID
pressure control associated with current active
recipe n.
Valid rage is from 0.0001 to 10, default setting is
0.02.
RD
d.dd Eee
(d,e=0 to 9)
n:d.dd Eee
(n=1 to 8)
(d,e=0 to 9)
Set or query the derivative control parameter for PID
pressure control associated with current active
recipe n.
Valid rage is from 0.001 to 1000, default setting is
1.5.
RB
d.dd Eee
(d,e=0 to 9)
n:d.dd Eee
(n=1 to 8)
(d,e=0 to 9)
Set or query the BASE parameter for PID pressure
control associated with current active recipe n. Valid
rage is from 1 to 100, default setting is 0.
RPRE
d.dd Eee
(d,e=0 to 9)
n:d.dd Eee
(n=1 to 8)
(d,e=0 to 9)
Set or query the PRESET parameter for PID
pressure control associated with current active
recipe n. Valid rage is from 1 to 100, default setting
is 99.
RST
d.dd Eee
(d,e=0 to 9)
n:d.dd Eee
(n=1 to 8)
(d,e=0 to 9)
Set or query the START parameter for PID pressure
control associated with current active recipe n. Valid
rage is from 1 to 100, default setting is 0.
RSST
d.dd Eee
(d,e=0 to 9)
n:d.dd Eee
(n=1 to 8)
(d,e=0 to 9)
Set or query the SOFT START parameter for PID
pressure control associated with current active
recipe n. Valid rage is from 1 to 1000 seconds,
default setting is 10 seconds.
RDIR Upstream
Downstream
n:Upstream
n:Downstream
Set or query the DIRECTION parameter for PID
pressure control associated with current active
recipe n. Default is Upstream.
PIDR ON, OFF ON, OFF, NAK
Start or stop the PID pressure control using current
active recipe.
Table 9-11 937B pressure (valve) serial control commands.