MKS 937B - Page 19

MKS 937B Operation Manual
19
1
Channel label
2
LED, indicating active channel
3
Liquid Crystal Display
4
Push Buttons for menu navigation
5
Power Switch
6
AIO Module
7
AC Power Inlet
8
RS232/485 Communication Port
9
Relay Output Port
10
Analog Output Port
11
Communication/Valve Control Module
12
Cold Cathode Module
13
High Voltage BNC connector
14
Current BNC connector
15
Pirani Module, MFC Module
16
Capacitance manometer Module