MKS 937B - Page 3

MKS 937B Operation Manual
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7.2 Installing hot cathode sensors .......................................................................................62
7.2.1 Locating a Hot Cathode Sensor .................................................................................62
7.2.2 Preventing Contamination in a Hot Cathode Sensor .................................................62
7.2.3 Orienting a hot cathode sensor ..................................................................................62
7.2.4 Connecting a Hot Cathode Sensor to the vacuum system ........................................62
7.2.5 Connecting a Hot Cathode Sensor to the 937B Controller ........................................63
7.3 Installing Pirani Sensors ................................................................................................65
7.3.1 Locating a Pirani Sensor ............................................................................................65
7.3.2 Preventing Contamination in a Pirani Sensor.............................................................65
7.3.3 Orienting the Series 317 Pirani Sensor......................................................................65
7.3.4 Orienting the Series 345 Pirani Sensor......................................................................65
7.3.5 Connecting the Series 317/345 Sensors....................................................................65
7.3.6 Preparing the 317 Sensor for Bakeout.......................................................................66
7.4 Capacitance Manometers - MKS Baratron....................................................................67
7.4.1 Installing a Baratron Capacitance Manometer...........................................................67
7.4.2 Connecting a Baratron™ Capacitance Manometer ...................................................67
8 Connecting Relay and Analog Outputs ...................................................................................69
8.1 Connecting 937B relay outputs......................................................................................69
8.1.1 Pin out for the 937B rel
ay output................................................................................69
8.1.2 Proper setting of a relay .............................................................................................70
8.1.3 Relay Inductive Loads and Arc Suppression..............................................................71
8.2 Connecting the 937B Analog Output.............................................................................71
8.3 Buffered analog output ..................................................................................................72
8.4 Logarithmic/Linear and combination analog output.......................................................82
8.4.1 Logarithmic/Linear analog output...............................................................................83
8.4.2 Combination analog output.........................................................................................83
8.4.3 Logarithmic/Linear analog output when the gauge power is turned off .....................85
9 937B RS232/485 Serial Communication Commands .............................................................86
9.1 Communication protocols ..............................................................................................86
9.2 Pressure reading commands.........................................................................................87
9.3 Relay and control setting commands ............................................................................88
9.4 Capacitance manometer control commands.................................................................89
9.5 Pirani and convection Pirani control commands............................................................89
9.6 Cold and Hot cathode control commands .....................................................................90
9.7 MFC control commands.................................................................................................91
9.8 Pressure (valve) control commands..............................................................................92
9.9 Sys
tem commands ........................................................................................................94
10 937A Emulated Operation and RS232/485 Serial Communication Commands.....................96
10.1 Operating the 937B controller in 937A emulated operation mode ................................96
10.2 Communication protocols ..............................................................................................98
. 98
10.3 Pressure reading commands.........................................................................................99
10.4 Relay and control setting commands ..........................................................................100
10.5 Cold cathode control commands.................................................................................100
10.6 User calibration commands .........................................................................................101
10.7 System commands ......................................................................................................101
10.8 ASCII character table...................................................................................................102
11 Maintenance of Series 937B Controller modules..................................................................103
11.1 Removing and Installing a Sensor Module..................................................................103
11.2 Removing and Installing AIO Module ..........................................................................104