MKS 937B - Page 4

MKS 937B Operation Manual
4
11.3 Communication Module...............................................................................................105
11.4 Power Supply...............................................................................................................105
11.5 Mounting the 937B controller.......................................................................................106
11.5.1 Mounting a single 937B controller into a 19" rack (HPS
®
Part # 100005651)..........106
11.5.2 Mounting the 937B controller with another ½ rack instrument (HPS
®
Part #
100007700) ..............................................................................................................107
11.6 AC Power Cord............................................................................................................107
12 Maintenance and Service of HPS

Vacuum Sensors...........................................................108
12.1 421 Cold cathode sensor.............................................................................................108
12.1.1 Cold cathode theory .................................................................................................108
12.1.2 Maintenance of Series 421/422 Cold Cathode Sensor............................................109
12.2 Maintenance of Series 423 I-MAG
®
Cold Cathode Sensor ........................................112
12.2.1 Connecting the I-MAG Sensor .................................................................................112
12.2.2 Disassembling the I-MAG Sensor ............................................................................112
12.2.3 Cleaning the I-MAG Sensor......................................................................................114
12.2.4 Assembling the I-MAG Sensor.................................................................................115
12.2.5 Preparing the Sensor for Bakeout............................................................................116
12.3 Maintenance of Low Power Nude and Mini BA hot cathode sensors..........................116
12.3.1 Hot cathode theory ...................................................................................................116
12.3.2 Cleaning the Hot Cathode Sensor............................................................................117
12.3.3 Testing the hot cathode sensor................................................................................117
12.4 Maintenance of Pirani Sensors....................................................................................118
12.4.1 Theory of a Pirani pressure sensor ..........................................................................118
12.4.2 Cleaning the Series 345 Sensor...............................................................................119
12.4.3 Cleaning the Series 317 Sensor...............................................................................120
12.5 Maintenance of Capacitance Manometer....................................................................121
12.5.1 Theory of a capacitance m
anometer........................................................................121
12.5.2 Repairing the Baratron™ Capacitance Manometer .................................................122
13 Spare Parts and Accessories ................................................................................................123
14 APPENDIX.............................................................................................................................126
14.1 Hot cathode gauge gas correction factors...................................................................126
14.2 MFC gas conversion factors for selected gases..........................................................129
15 Product Warranty...................................................................................................................131