MKS 937B - Page 5

MKS 937B Operation Manual
5
List of Figures
Figure 3-1 937B front Panel. .............................................................................................................18
Figure 3-2 937B rear panel................................................................................................................18
Figure 5-1 937B front view. .................................................................................................................21
Figure 6-1 Standard 937B LCD front panel display for pressure measurement (a) Leak detection
mode; (b) MFC Ratio or Valve control mode...............................................................................24
Figure 6-2 A comparison between standard display mode and large font display mode for the 937B
LCD display (a) during pressure measurement; (b) during MFC Ratio Control/Valve pressure
control. .........................................................................................................................................25
Figure 6-3 937B system setup parameters, their default values and ranges....................................26
Figure 6-4 System setup information displayed on 937B LCD screen..............................................27
Figure 6-5 System firmware and serial number information displayed on 937B LCD screen. .........30
Figure 6-6 Setting DAC logarithmic and linear analog output.............................................................30
Figure 6-7 937B Channel Setup setting parameters, their default values and ranges. .....................33
Figure 6-8 Capacitance manometer setup information displayed on the 937B LCD screen............34
Figure 6-9 Pirani/Convention Pirani setup information that is displayed on the 937B LCD screen..36
Figure 6-10 Cold cathode setup information as displayed on 937B LCD screen. ............................39
Figure 6-11 Hot cathode setup information displayed on 937B LCD screen.....................................42
Figure 6-12 MFC setup information displayed on 937B LCD screen...................................................49
Figure 6-13 The MFC/Valve Control Recipe Setup Screen. ................................................................54
Figure 6-14 System setup display. .......................................................................................................57
Figure 6-15 MFC ratio control setup screen.........................................................................................58
Figure 6-16 Pressure control setup screen. ........................................................................................60
Figure 7-1 13 pin D-Sub connector on the back of 937B HC board..................................................63
Figure 7-2 LPN gauge cable diagram. ..............................................................................................64
Figure 7-3 Mini BA gauge cable diagram..........................................................................................64
Figure 7-4 317/345 cable diagram.....................................................................................................66
Figure 7-5 The wiring diagram for the Capacitance Manometer cable.............................................68
Figure 8-1 Definition of the parameters used for relay control..........................................................70
Figure 8-2 The relay arc suppression network..................................................................................71
Figure 8-3 Buffered analog output for cold cathode gauges (421/422/423) in N
2
.............................73
Figure 8-4 Buffered analog output for hot cathode gauges; same as the logarithmic analog output.
.....................................................................................................................................................75
Figure 8-5 Buffered analog output for a 345 Pirani gauge................................................................76
Figure 8-6 Buffered analog output for the 317 convection Pirani gauge...........................................79
Figure 8-7 Buffered analog output for capacitance manometers......................................................82
Figure 8-8 Setup screen for setting combination channel parameters.................................................84
Figure 11-1 Instructions for removing AIO module..........................................................................104
Figure 11-2 Instruction for connecting wire on the back of the power cord receptor. .....................105
Figure 11-3 The 937B controller power supply. ..............................................................................106
Figure 12-1 A comparison of Inverted Magnetron (left) and Penning (right) cold cathode gauges.108
Figure 12-2 Electron orbits and ion production in an inverted magnetron. .....................................109
Figure 12-3 An exploded view of the 421/422 cold cathode gauge assembly................................110
Figure 12-4 An exploded view of the Series 423 I-MAG cold cathode gauge sensor.....................113
Figure 12-5 BA gauge structure and electron process inside the gauge........................................116
Figure 12-6 Filament pin locator for LPN and mini BA gauges.......................................................118
Figure 12-7 Schematic of a Pirani thermal conductivity sensor. .....................................................118
Figure 12-8 Natural convection heater transfer in horizontal (left) and vertical (right) sensor tubes.
...................................................................................................................................................119
Figure 12-9 Exploded view of a MKS Capacitance manometer sensor..........................................121