MKS 937B - Page 6

MKS 937B Operation Manual
6
List of Tables
Table 6-1 Valid gauges for autozeroing capacitance manometers of different ranges.....................35
Table 6-2 Relative ionization correction factor to N2 for different gases...........................................42
Table 6-3 Pin out for ion gauge remote control.................................................................................46
Table 7-1 Hot cathode connector pin out. .........................................................................................63
Table 7-2 Pin assignment for HC sensor type identification. ............................................................64
Table 7-3 Pin out for 317/345 cables. ...............................................................................................67
Table 7-4 Pin out of the 9 pin D-Sub connector on CM module........................................................68
Table 8-1 Pin out for the 937B relay output.......................................................................................69
Table 8-2 Pin out for 937B analog output..........................................................................................72
Table 8-3 Buffered analog output when sensor power is off...............................................................72
Table 8-4 Buffered analog output for the cold cathode gauges (421/422/423) in N
2
........................74
Table 8-5 Equations for 937B Cold Cathode gauges (N
2
) ................................................................74
Table 8-6 Buffered analog output for the 315/345 Pirani sensors.....................................................77
Table 8-7 Equations for the 315/345 Pirani sensors..........................................................................78
Table 8-8 Buffered analog output for the 317 Convection Pirani sensor. .........................................80
Table 8-9 Equations for the 317 Convection Pirani sensor...............................................................81
Table 9-1 937B serial communication wiring diagram. .......................................................................86
Table 9-2 937B serial communication command protocol. .................................................................86
Table 9-3 937B pressure reading commands. ....................................................................................87
Table 9-4 937B relay and control serial setting commands. ...............................................................88
Table 9-5 937B capacitance manometer serial commands..............................................................89
Table 9-6 937B Pirani and Convection Pirani control commands.....................................................89
Table 9-7 937B cold and hot cathode control commands.................................................................90
Table 9-8 937B MFC serial control commands...................................................................................92
Table 9-9 937B pressure (valve) serial control commands.................................................................92
Table 9-10 937B system commands.................................................................................................95
Table 9-11 937B serial communication error codes..........................................................................95
Table 10-1 Description of pin assignment for adapting 937A 15 pin connector to 937B 25 pin
connector for relay output............................................................................................................96
Table 10-2 A description of the pin assignments for adapting the 937A 25 pin connector to the 937B
37 pin connector for analog output and gauge control when a dual PR/CM board is installed in
slot A. ...........................................................................................................................................97
Table 10-3 A description of the pin assignments for adapting the 937A 25 pin connector to the 937B
37 pin connector for analog output and gauge control when a CC board is installed in slot A...97
Table 10-4 937B serial communication wire diagram. ........................................................................98
Table 10-5 The 937A serial communication command protocol.......................................................98
Table 10-6 937A pressure reading serial commands........................................................................99
Table 10-7 The 937A relay and control setting commands.............................................................100
Table 10-8 The 937A cold cathode control commands...................................................................100
Table 10-9 937A user calibration commands..................................................................................101
Table 10-10 937A system comm
ands.............................................................................................101
Table 10-11 ASCII character table. .................................................................................................102
Table 12-1 Resistance readings of a normal HC sensor. ...............................................................117
Table 12-2 Bridge resistance value for a normal 345 Pirani sensor. ..............................................120
Table 12-3 Resistance values for a normal 317 convection enhanced Pirani sensor. ...................121