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MKS G Series User Manual

MKS G Series
113 pages
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Table of Contents
ii
Mounting Hardware ..................................................................................................................................................... 26
Installation Procedure .................................................................................................................................................. 26
Chapter Four: Analog and Digital Interfaces .............................................................................................. 29
Analog I/O Interface Cables ........................................................................................................................................ 29
Analog Interface Input and Output Options................................................................................................................. 30
Digital Interface Input and Output Options ................................................................................................................. 33
Chapter Five: Ethernet Interface Setup and Configuration ...................................................................... 44
Step 1: Install the Java™ Plug-in (for single IP address) ............................................................................................ 44
Step 2: Setup Network for Communication through Ethernet ..................................................................................... 45
Chapter Six: Embedded Web-Based GUI and Diagnostics ........................................................................ 54
Logging On to Your MFC ........................................................................................................................................... 54
Monitor Mode .............................................................................................................................................................. 54
Setup Mode .................................................................................................................................................................. 59
Chapter Seven: Maintenance ........................................................................................................................ 68
General Information .................................................................................................................................................... 68
Recalibration ................................................................................................................................................................ 68
Flow Zero Adjustment ................................................................................................................................................. 68
Chapter Eight: Troubleshooting ................................................................................................................... 73
Troubleshooting Chart ................................................................................................................................................. 73
Appendix A: Product Specifications ............................................................................................................. 79
Performance Specifications – GE50A/GV50A/GM50A ............................................................................................. 79
Specifications are subject to change without notice.Mechanical Specifications - GE50A/GV50A/GM50A ............. 79
Electrical Specifications for GE50A, GM50A and GV50A ....................................................................................... 80
Appendix B : Model Code Explanation for GE50A & GV50A .................................................................. 84
Model Code Description – Elastomer Sealed Products ............................................................................................... 84
Appendix C: Model Code Explanation for GM50A .................................................................................... 90
Model Code Description – GM50A – Metal Sealed Products ..................................................................................... 90
Appendix D : Outline Drawings .................................................................................................................... 96
GE50A MFC and GM50A MFC/MFM ....................................................................................................................... 96
GV50A MFC w/ Integral Shut-off Valve .................................................................................................................... 99
Appendix D: Health and Safety Form ........................................................................................................ 102
......................................................................................................................................................................... 102

Table of Contents

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MKS G Series Specifications

General IconGeneral
BrandMKS
ModelG Series
CategoryController
LanguageEnglish

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