Chapter Four: Maintenance General Information
21
Chapter Four: Maintenance
General Information
Any difficulties encountered in the use of valves are generally caused by process chemistry,
contamination of wetted parts, or mechanical wear. Should unacceptable performance result, it is
recommended that you contact an MKS Service Center for repair instructions.
Warning
All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials. The Type 653 valve,
in particular,
must
be purged of all contaminants.
Safety Precautions
MKS products are designed and tested to provide the highest degree of safety attainable. To use
your MKS valve safely, you must always conform to the following instructions:
Warning
!
The moving parts in the valve create a risk of personal injury
until the valve is securely incorporated into a system. To
avoid injury keep all objects away from any valve opening.
•
Do not insert objects into openings where contact with moving parts is possible.
•
Isolate the equipment from any electrical or pneumatic power supply before handling the
valve.
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