MKS 653B - Choosing a Pressure Controller; Flange Types; Figure 1: Outline Dimensions of the Motor Driver Assembly

Chapter Two: Installation Flan
g
e T
yp
es
9
Choosing A Pressure Controller
The 653 valve works with the following pressure controllers:
•
Type 651 (any revision)
•
Type 1651 (any revision)
•
Type 652 (Revision B or later)
Note
Revision A of the 652 controller
does not support
the 653 valve.
90°75°60°
45°
30°15°0°
0.31 Max
(
7.9
)
6.06
(
154.1
)
9-pin T
y
pe "D"
(
male
)
3.95 Dia.
(100.3)
Figure 1: Outline Dimensions of the Motor Driver Assembly
Flange Types
The 653 valve has available five series of flange types: ASA, CF, ISO-NW, JIS, and KF. Refer
to the appropriate tables and outline drawings on the following pages for information about the
various flange types.