General Operation Information Cha
ter Three: O
eration
20
General Operation Information
The Type 653 valve is controlled by the Type 651, 1651, or 652B pressure controller, and
instructions for operation are included in those manuals. There is no warm-up time required for
the valve.
Caution
To avoid unstable pump performance when operating the 653 valve
with high vacuum diffusion pumps, make certain the pressure above
the oil vapor jet
does not
exceed 0.5 mTorr. If the pressure
does
exceed 0.5 mTorr, the pump's oscillation will appear to be an
unstable control loop. If this occurs, lower the flow rates to ensure
that the diffusion pump can operate in its correct pressure range.
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