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MKS 649B - Physical Specifications

MKS 649B
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Physical Specifications Appendix A: Product Specifications
46
Physical Specifications
Burst Pressure
1500 psia [1.03 x 10
4
kPa]
Dimensions 3.81 cm x 12.07 cm (less fittings) x 14.1 cm max.
Fittings Cajon
®
4-VCR
®
male compatible, 8-VCR male
compatible
Full Scale Ranges
Pressure
Flow
10 Torr [1.33 x 10
3
Pa]
20 Torr [2.66 x 10
3
Pa]
50 Torr [6.66 x 10
3
Pa]
100 Torr [1.33 x 10
4
Pa]
1000 Torr [1.33 x 10
5
Pa]
10, 20, 50, 100, 200, 500, 1000, 2000, 5000 sccm
Input Power± ±15 VDC ±5%, 250 mA, maximum during first
five seconds at start up, 200 mA at steady state
Maximum Cable Length 100 ft.
Overpressure Limit 45 psia [310 kPa] or 200% F.S., whichever is
greater
Output Signals
Flow
Pressure
0 to 5 VDC
0 to 10 VDC initial configuration
(0 to 5 VDC jumper selectable)
Set Point Input 0 to 5 V or 0 to 10 V (matches the pressure signal
output)
Pressure Transducer Absolute pressure capacitance manometer
Valve Options
Type
Seat Material
Normally closed
Kel-F
®
, Viton
®
, metal or Kalrez
®
Surface Finish
<0.4
μm, Ra, electropolished
Weight 1.6 kg
Wetted Materials (excluding valve seat) 316L VIM/VAR stainless steel, Inconel
®
, Nickel,
Elgiloy
®

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