MKS 649B - Cleanliness Features; How this Manual Is Organized; Manual Conventions

How This Manual is Organized Chapter One: General Information
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gases with different densities, which dramatically improves measurement accuracy when gases
other than the calibration gas are used.
Cleanliness Features
The design of the pressure controller ensures extremely low external leakage and minimizes a key
source of particle generation, outgassing, and permeation. The design also incorporates minimal
wetted surface area. To further ensure its cleanliness, the 649 controller undergoes precision
machining as well as a proprietary cleaning process. The instrument is assembled and double-
bagged in a Class 100 clean room.
How This Manual is Organized
This manual is designed to provide instructions on how to set up, install, and operate a Type 649
unit.
Before installing your Type 649 unit in a system and/or operating it, carefully read and
familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all
WARNING and
CAUTION notes provided throughout the manual.
Chapter One, General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two, Installation, explains the environmental requirements and describes how to mount
the instrument in your system.
Chapter Three, Overview, gives a brief description of the instrument and its functionality.
Chapter Four, Operation, describes how to use the instrument and explains all the functions and
features.
Chapter Five, Maintenance, lists any maintenance required to keep the instrument in good
working condition.
Chapter Six, Troubleshooting, provides a reference should the instrument malfunction.
Appendix A: Product Specifications, lists the specifications of the instrument.
Appendix B: Model Code Explanation, describes the model code.
Appendix C: Valve Orifice Selection, presents the information used to select the appropriate flow
range for nitrogen and other gases.
Manual Conventions
The following conventions apply throughout this manual:
XXXXXX
For inputs: Indicates that the line must be pulled low to activate the function.
For outputs: Indicates that the output is active low.