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MKS 937B Series User Manual

MKS 937B Series
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MKS 937B Operation Manual
89
937B (37pin Dsub)
Æ
937A (25pin Dsub)
Pin Description Pin Description
1 Buffered Aout A1
Æ
2 Buffered Aout, CC
3 Buffered Aout B1
Æ
3 Buffered Aout, A1
4 Buffered Aout B2
Æ
4 Buffered Aout, A2
5 Buffered Aout C1
Æ
5 Buffered Aout, B1
6 Buffered Aout C2
Æ
6 Buffered Aout, B2
7 Log Aout A1
Æ
7 Log Aout, CC
9 Log Aout B1
Æ
8 Log Aout, A1
10 Log Aout B2
Æ
9 Log Aout, A2
11 Log Aout C1
Æ
10 Log Aout, B1
12 Log Aout C2
Æ
11 Log Aout, B2
13 Combination Aout 1
Æ
1 Combination, CC
15 Ion Gauge ON A1
Æ
13 CC disable
21-37
t37
Ground
Æ
14-24 Ground
21-37
t37
Ground
Æ
25 CC disable return
Table 10-2 A description of the pin assignments for adapting the 937A 25 pin connector to the
937B 37 pin connector for analog output and gauge control when a dual PR/CM board is installed
in slot A.
937B (37pin Dsub)
Æ
937A (25pin Dsub)
Pin Description Pin Description
1 Buffered Aout A1
Æ
2 Buffered Aout, CC
3 Buffered Aout B1
Æ
3 Buffered Aout, A1
4 Buffered Aout B2
Æ
4 Buffered Aout, A2
5 Buffered Aout C1
Æ
5 Buffered Aout, B1
6 Buffered Aout C2
Æ
6 Buffered Aout, B2
7 Log Aout A1
Æ
7 Log Aout, CC
9 Log Aout B1
Æ
8 Log Aout, A1
11 Log Aout C1
Æ
10 Log Aout, B1
12 Log Aout C2
Æ
11 Log Aout, B2
13 Combination Aout 1
Æ
1 Combination, CC/B1
14 Combination Aout 2
Æ
9 Combination A/B2
15 Ion Gauge ON A1
Æ
13 CC disable
21-37
t37
Ground
Æ
14-24 Ground
21-37 Ground
Æ
25 CC disable return
Table 10-3 A description of the pin assignments for adapting the 937A 25 pin connector to the
937B 37 pin connector for analog output and gauge control when a CC board is installed in slot A.
When setting the 937B to 937A operation mode, the old 937A communication cable has to
be re-wired. Ddetails are shown in Table 10-3

Table of Contents

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MKS 937B Series Specifications

General IconGeneral
BrandMKS
Model937B Series
CategoryController
LanguageEnglish

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