MKS 937B Series User Manual

MKS 937
B
12.2.3
Dependin
cleaned
—
Ultrasoni
c
A
LCONO
Scrub wit
h
effective.
h
s
e
s
m
m
u
Each of t
h
Dry all int
e
spacers,
absorbed
12.2.4
1.
R
p
o
s
t
2. I
n
g
r
3. S
s
h
4.
C
B
Operation M
a
Clea
g on the deg
r
—
either ultra
s
Do not
c
ally clean su
X
®
).
h
a mild abra
s
Rinse with al
Clean
a
y
droxide so
l
e
miconduct
o
m
ut (the bla
c
m
inutes.
Chem
ltrasonic cl
e
Do not
h
e cleaning
m
e
rnal compo
n
4
and
7
water.
Ass
e
Wear g
l
R
oll the senso
o
rt, check th
e
t
raight and c
e
n
stall the gro
u
r
ound shield
lide the smal
l
h
ield
8
.
C
heck that th
e
6
, as shown
a
nual
ning the I
r
ee of conta
m
s
onically, wit
h
touch any v
a
rfaces using
o
s
ive to remo
v
cohol.
a
luminum an
l
ution, at ro
o
o
r processi
n
c
k residue l
e
ical cleanin
g
e
aning are a
c
damage the
m
ethods desc
r
n
ents and th
e
,
are slightly
p
e
mbling t
h
l
oves and a
s
r body
9
o
n
e
anode
10
f
o
e
ntered with t
h
u
nd shield
8
8
drops int
o
l
ceramic sp
a
e
leaf spring
to the right.
I
-MAG Se
n
m
ination and t
h
mild abrasi
v
a
cuum-expo
o
nly high qu
a
v
e most cont
a
d ceramic p
a
o
m temperat
u
n
g). Follow
w
e
ft on alumi
n
g
should not
c
ceptable.
leaf spring
r
ibed above
s
e
sensor bod
y
p
orous and
w
h
e I-MAG
s
semble wit
h
n
a flat surfa
c
o
r any radial
h
e sensor bo
using twee
z
o
the locatin
g
a
cer
7
over
t
1
will conta
c
I
f not, remov
e
106
n
so
r
he applicatio
n
v
es, or chemi
c
sed part aft
e
a
lity detergen
t
a
mination. Sc
o
a
rts chemic
a
u
re (20°C) f
o
w
ith a prelimi
n
um parts) i
n
be used to
c
1
while cl
e
s
hould be foll
o
y
9
in a cle
a
w
ill require lon
Senso
r
h
clean tools
c
e and, lookin
runout motio
n
d
y
9
for p
r
z
ers. Make s
u
g
collar
11
.
t
he small end
c
t the base o
f
e
the small c
e
n
of the sens
o
c
ally.
e
r cleaning
u
t
s compatibl
e
otch-Brite™
o
a
lly in a was
h
o
r one minut
e
nary rinse
w
n
a 50 to 70
%
c
lean the an
o
e
aning the S
o
wed with m
u
an oven set
a
n
ger drying ti
m
.
g down the
n
. It should b
e
r
oper operati
o
u
re that the
of the groun
f
the cathode
e
ramic space
r
o
r, the intern
a
u
nless weari
n
e
with alumin
u
o
r fine emery
h
such as a
e
(not reco
m
w
ith deionize
d
%
nitric acid
d
o
d
e
; mild a
b
S
ensor.
u
ltiple rinses
o
a
t 150°C. Th
e
m
e in the ove
n
e
o
n.
d
r
a
l parts may
b
n
g gloves.
u
m (i.e.
cloth may b
e
5 to 20% so
d
m
mended for
d
water. Re
m
d
ip for abou
t
b
rasives or
o
f deionized
w
e
two cerami
c
n
to drive off
t
b
e
e
d
ium
m
ove
t
5
w
ater.
c
t
he

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English