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937B Series
MKS 937B Series User Manual
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MKS 937B Operation Manu
al
105
Figure 12-4 An exploded v
iew of the Series 423 I-MAG cold cathode g
auge sensor.
D
o
n
o
t
b
e
n
d
t
h
e
a
n
o
d
e
10
or the leaf spring
1
on the ion c
urrent feedth
rough
pin when assembling or disassembling the Sens
or.
Leaf Spring
High Voltage
Feedthrough Pin
Flathead Screw (2)
Magnet
Ion Current
Feedt
hrou
gh Pi
n
Glass Insulator
Locating Collar
Anode
Sensor Body
Ground Shield
Ceramic Spacer, Small
Cathode
Grid Was
her
Ceramic
Space
r, Large
Compression Spring
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
104
106
Table of Contents
Table of Contents
2
Package Contents
7
Safety Information
8
Symbols Used in this Manual and Their Definitions
8
Safety Precautions
8
Safety Procedures and Precautions
8
Specifications
10
Controller
10
Sensors
12
Controller Display Messages
16
Feature, Control Locations and Dimensions
17
Figure 3-1 937B Front Panel
17
Figure 3-2 937B Rear Panel
17
Figure 3-3 937B External Dimensions (Inches)
18
Typical Applications for the Series 937B Controller
19
HPS Products Series 937B Multi-Sensor High Vacuum System
20
Figure 5-1 937B Front View
20
Operating the Series 937B Controller
22
Power
22
Front Panel Control Lock
22
Front Panel Display
22
Standard Front Panel Display
22
Figure 6-1 Standard 937B LCD Front Panel Display for Pressure Measurement under Leak Detection Mode
22
Large Font Displays
23
System Setup
24
Overview of 937B System Setup
24
Figure 6-2 a Comparison between Standard Display Mode and Large Font Display Mode for the 937B LCD Display During Pressure Measurement
24
Figure 6-3 937B System Setup Parameters, Their Default Values and Ranges
24
Display System Setup Parameters
25
Change and Save a Parameter Value
25
Figure 6-4 System Setup Information Displayed on 937B LCD Screen
25
Description of the System Setup Parameters
26
Figure 6-5 Setting DAC Logarithmic and Linear Analog Output
28
Table 6-1 Valid Gauges for Autozeroing Capacitance Manometers of Different Ranges
28
Figure 6-6 System Firmware and Serial Number Information Displayed on 937B LCD Screen
29
Channel Setup for Pressure Measurement
30
Overview of 937B Channel Setup
30
Setup for a Capacitance Manometer
32
Setup for a PR (Pirani)/Cp (Convection Pirani) Sensor
34
Setup a Cold Cathode Sensor
37
Setup a Hot Cathode Sensor
40
Figure 6-11 Hot Cathode Setup Information Displayed on 937B LCD Screen
41
Table 6-2 Relative Ionization Correction Factor to N2 for Different Gases
41
Power Control of a Pressure Sensor
43
Power (Including Degas) Control of a Sensor Using Front Panel Control Button
43
Power (Including Degas) Control of a Sensor Via 37 Pin AIO Dsub Connector
44
Power (Including Degas) Control of a Sensor Using Serial Communication Commands.45
45
Leak Test Using the 937B Controller
45
Leak Test Principle Applied for the 937B
45
Table 6-3 Pin out for Ion Gauge Remote Control
45
Procedures for a Leak Test with the 937B
46
Installing Vacuum Sensors
48
Installing Cold Cathode Sensors
48
Locating a Cold Cathode Sensor
48
Orienting a Cold Cathode Sensor
48
Managing Contamination in a Cold Cathode Sensor
48
Connecting the Series 421/422 Sensor
48
Connecting the 423 I-MAG Sensor
49
Installing Hot Cathode Sensors
49
Locating a Hot Cathode Sensor
49
Preventing Contamination in a Hot Cathode Sensor
49
Orienting a Hot Cathode Sensor
49
Connecting a Hot Cathode Sensor to the Vacuum System
49
Connecting a Hot Cathode Sensor to the 937B Controller
50
Figure 7-1 13 Pin D-Sub Connector on the Back of 937B HC Board
50
Table 7-1 Hot Cathode Connector Pin out
50
Figure 7-2 LPN Gauge Cable Diagram
51
Figure 7-3 Mini BA Gauge Cable Diagram
51
Table 7-2 Pin Assignment for HC Sensor Type Identification
51
Installing Pirani Sensors
52
Locating a Pirani Sensor
52
Preventing Contamination in a Pirani Sensor
52
Orienting the Series 317 Pirani Sensor
52
Orienting the Series 345 Pirani Sensor
52
Connecting the Series 317/345 Sensors
52
Figure 7-4 317/345 Cable Diagram
53
Table 7-3 Pin out for 317/345 Cables
53
Preparing the 317 Sensor for Bakeout
54
Capacitance Manometers - MKS Baratron
54
Installing a Baratron Capacitance Manometer
54
Connecting a Baratron™ Capacitance Manometer
54
Table 7-4 Pin out of the 9 Pin D-Sub Connector on CM Module
54
Figure 7-5 the Wiring Diagram for the Capacitance Manometer Cable
55
Connecting Relay and Analog Outputs
56
Connecting 937B Relay Outputs
56
Pin out for the 937B Relay Output
56
Table 8-1 Pin out for the 937B Relay Output
56
Proper Setting of a Relay
57
Figure 8-1 Definition of the Parameters Used for Relay Control
57
Relay Inductive Loads and Arc Suppression
58
Connecting the 937B Analog Output
58
Figure 8-2 the Relay Arc Suppression Network
58
Buffered Analog Output
59
Table 8-2 Pin out for 937B Analog Output
59
Table 8-3 Buffered Analog Output When Sensor Power Is off
59
Figure 8-3 Buffered Analog Output for Cold Cathode Gauges (421/422/423) in N
60
Table 8-4 Buffered Analog Output for the Cold Cathode Gauges (421/422/423) in N
61
Table 8-5 Equations for Cold Cathode Gauges (N ) Raw Analog Output
61
Figure 8-4 Buffered Analog Output for Hot Cathode Gauges; same as the Logarithmic Analog Output
62
Figure 8-5 Buffered Analog Output for a 345 Pirani Gauge
63
Table 8-6 Buffered Analog Output for the 315/345 Pirani Sensors
64
Table 8-7 Equations for the 315/345 Pirani Sensors
65
Figure 8-6 Buffered Analog Output for the 317 Convection Pirani Gauge
66
Table 8-8 Buffered Analog Output for the 317 Convection Pirani Sensor
67
Table 8-9 Equations for the 317 Convection Pirani Sensor
68
Logarithmic/Linear and Combination Analog Output
69
Figure 8-7 Buffered Analog Output for Capacitance Manometers
69
Logarithmic/Linear Analog Output
70
Combination Analog Output
70
Figure 8-8 Setup Screen for Setting Combination Channel Parameters
71
Logarithmic/Linear Analog Output When the Gauge Power Is Turned off
72
RS232/485 Serial Communication Commands
73
Communication Protocols
73
Table 9-1 937B Serial Communication Wiring Diagram
73
Table 9-2 937B Serial Communication Command Protocol
73
Pressure Reading Commands
74
Table 9-3 937B Pressure Reading Commands
74
Relay and Control Setting Commands
75
Table 9-4 937B Relay and Control Serial Setting Commands
75
Capacitance Manometer Control Commands
76
Pirani and Convection Pirani Control Commands
76
Table 9-5 937B Capacitance Manometer Serial Commands
76
Table 9-6 937B Pirani and Convection Pirani Control Commands
76
Cold Cathode Control Commands
77
Table 9-7 937B Cold and Hot Cathode Control Commands
77
Hot Cathode Control Commands
78
Table 9-8 937B Cold and Hot Cathode Control Commands
78
System Commands
79
Error Code
80
Table 9-13 937B System Commands
80
Table 9-14 937B Serial Communication Error Codes
80
Profibus Communication Protocol and Commands
81
Electrical Connections
81
Profibus GSD Protocol
81
Table 9-15 937B Profibus Electrical Connections
81
Table 9-16 937B Profibus Command List
82
Profibus Output Buffer Map
83
Table 9-17 937B Profibus Output Buffer Map
84
Profibus Input Buffer Map
85
Table 9-18 937B Profibus Input Buffer Map
87
Emulated Operation and RS232/485 Serial Communication Commands
88
Operating the 937B Controller in 937A Emulated Operation Mode
88
Table 10-1 Description of Pin Assignment for Adapting 937A 15 Pin Connector to 937B 25 Pin Connector for Relay Output
88
Table 10-2 a Description of the Pin Assignments for Adapting the 937A 25 Pin Connector to the 937B
89
Communication Protocols
90
Table 10-4 937B Serial Communication Wire Diagram
90
Table 10-5 the 937A Serial Communication Command Protocol
90
Pressure Reading Commands
91
Table 10-6 937A Pressure Reading Serial Commands
91
Relay and Control Setting Commands
92
Cold Cathode Control Commands
92
Table 10-7 the 937A Relay and Control Setting Commands
92
Table 10-8 the 937A Cold Cathode Control Commands
92
User Calibration Commands
93
System Commands
93
Table 10-9 937A User Calibration Commands
93
Table 10-10 937A System Commands
93
ASCII Character Table
94
Table 10-11 ASCII Character Table
94
Maintenance of Series 937B Controller Modules
95
Removing and Installing a Sensor Module
95
Removing and Installing AIO Module
96
Figure 11-1 Instructions for Removing AIO Module
96
Communication Module
97
Power Supply
97
Figure 11-2 Instruction for Connecting Wire on the Back of the Power Cord Receptor
97
Mounting the 937B Controller
98
Figure 11-3 the 937B Controller Power Supply
98
AC Power Cord
99
Maintenance and Service of HPS Vacuum Sensors
100
Cold Cathode Sensor
100
Cold Cathode Theory
100
Figure 12-1 a Comparison of Inverted Magnetron (Left) and Penning (Right) Cold Cathode Gauges
100
Maintenance of Series 421/422 Cold Cathode Sensor
101
Figure 12-2 Electron Orbits and Ion Production in an Inverted Magnetron
101
Figure 12-3 an Exploded View of the 421/422 Cold Cathode Gauge Assembly
102
Maintenance of Series 423 I-MAG Cold Cathode Sensor
104
Connecting the I-MAG Sensor
104
Disassembling the I-MAG Sensor
104
Figure 12-4 an Exploded View of the Series 423 I-MAG Cold Cathode Gauge Sensor
105
Cleaning the I-MAG Sensor
106
Assembling the I-MAG Sensor
106
Preparing the Sensor for Bakeout
107
Maintenance of Low Power Nude and Mini BA Hot Cathode Sensors
107
Hot Cathode Theory
107
Cleaning the Hot Cathode Sensor
108
Figure 12-5 BA Gauge Structure and Electron Process Inside the Gauge
108
Testing the Hot Cathode Sensor
109
Maintenance of Pirani Sensors
109
Theory of a Pirani Pressure Sensor
109
Figure 12-6 Filament Pin Locator for LPN and Mini BA Gauges
109
Table 12-1 Resistance Readings of a Normal HC Sensor
109
Cleaning the Series 345 Sensor
110
Figure 12-7 Schematic of a Pirani Thermal Conductivity Sensor
110
Figure 12-8 Natural Convection Heater Transfer in Horizontal (Left) and Vertical (Right) Sensor Tubes
110
Cleaning the Series 317 Sensor
111
Table 12-2 Bridge Resistance Value for a Normal 345 Pirani Sensor
111
Maintenance of Capacitance Manometer
112
Theory of a Capacitance Manometer
112
Figure 12-9 Exploded View of a MKS Capacitance Manometer Sensor
112
Table 12-3 Resistance Values for a Normal 317 Convection Enhanced Pirani Sensor
112
Repairing the Baratron™ Capacitance Manometer
113
Spare Parts and Accessories
114
Appendix
117
Hot Cathode Gauge Gas Correction Factors
117
Product Warranty
120
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MKS 937B Series Specifications
General
Brand
MKS
Model
937B Series
Category
Controller
Language
English
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