MKS 937B Series User Manual

MKS 937B Operation Manual
12
2.2 Sensors
Sensor type
CC (Cold Cathode) Series 421 and 422 inverted magnetron
Series 423 I-MAG
®
HC (Hot Cathode) Bayard—Alpert (BA) type ionization gauges including HPS MIG
(Miniature Ionization Gauge, or LPN (Low Power Nude), glass
enveloped gauges and UHV nude type.
Pirani Series 345 Pirani
CP (Convection Pirani) Series 317 Convection Pirani
(CM) Capacitance Manometer MKS unheated Baratron
®
(622A, 623A, 626A, 722A );
MKS 45 C heated Baratron
®
(624B,D24B, 627B,D27B);
MKS differential Baratron
®
Pressure measurement range
CC (Cold Cathode) 1.0 x 10
-11
to 1.0 x 10
-2
Torr
1.3 x 10
-11
to 1.3 x 10
-2
mbar
1.3 x 10
-9
to 1.3 x 10
+0
Pa
HC (Hot Cathode) 1 .0x 10
-10
to 1.0 x 10
-2
Torr
1.3 x 10
-10
to 1.3 x 10
-2
mbar
1.3 x 10
-8
to 1.3 x 10
+0
Pa
HC with UHV type gauge 2 .0x 10
-11
to 1.0 x 10
-2
Torr
2.3 x 10
-11
to 1.3 x 10
-2
mbar
2.3 x 10
-10
to 1.3 x 10
+0
Pa
Pirani 5.0 x 10
-4
to 4.0 x 10
+2
Torr
6.5 x 10
-4
to 5.2 x 10
+2
mbar
6.5 x 10
-2
to 5.2 x 10
+4
Pa
CP (Convection Pirani) 1.0 x 10
-3
to 1.0 x 10
+3
Torr
1.3 x 10
-3
to 1.3 x 10
+3
mbar
1.3 x 10
-1
to 1.3 x 10
+5
Pa
(CM) Capacitance Manometer Three decades below full scale of head, (e.g., 10 Torr head is1.0
x 10
-2
to 1.0 x 10
+1
Torr)
Response time (Buffered analog output)
CC <40 msec
6
HC <50 msec
Pirani, CP <80 msec
CM <40 msec
Response time (Log/Lin analog output)
CC <50 msec
HC <50 msec
6
A fast response (<3 msec) cold cathode board is also available. Please consult the factory for details.

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English