MKS 937B Operation Manual
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Power requirement (nominal) 100 - 240 VAC, 50/60 Hz
Mains voltage Fluctuations not to exceed ±10% of nominal
Power consumption 150 W maximum
Fuse rating, size 2X2A, 250V, Ø 5 mm x 20 mm
Process control relay 12 nonvolatile relays, (4 for each sensor module)
Relay rating SPDT, 2 A @ 30 V resistive
Relay response 150 msec maximum
Analog outputs
5
One Buffered and one Logarithmic/Linear for each channel, up to
two (2) wide-range combination logarithmic outputs. Output
impedance = 100 ohms
Number of channels up to 6
Front panel controls Power on-off switch, setup and operational commands can be
accessed via the keypad.
Display 320x240 color QVGA TFT LCD with back lighting.
Pressure units Torr, mbar, Pascal or microns
Update rate LCD display is updated 3 times per second. The pressure/flow
signals are updated every 50 msec.
Leak test 25-segment bar graph with a variable rate audio signal
Sensor module slots 3
Sensor modules channels/module
Cold Cathode single
Hot Cathode single
Pirani/Convection Pirani dual
Capacitance Manometer dual
COMM/Control modules
ProfiBus
Pressure Control
Computer interface Serial – RS-232 and RS-485 9600, 19200, 38400,57600,115200
baud rate selectable
Electronic casing Aluminum
Dimensions (W x D x H) 9½" x 12¼" x 3½" (241 mm x 311 mm x 88 mm)
Size ½ rack, 2U high
Typical weight 8.0 lb (3.6 kg)
CE certification EMC Directive: 2004/108/EEC
Low Voltage Directive: 73/23/EEC
5
Logarithmic/linear and combined logarithmic analog outputs can be customized using the system setup
manual.
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