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MKS 937B Operation Manual

Package Contents

Before unpacking the 937B high vacuum, multi-sensor system controller, check all

surfaces of the packing material for shipping damage.

Please be sure that the 937B system contains the following items:

x 1 Series 937B controller (with selected modules installed)

x 1 female, 25-pin Dsub connector for relay output connection

x 1 male, 37pin Dsub connector for analog output connection

x 1 10-foot power cord (US customer only)

x 1 HPS

Products Series 937B User’s Manual CD

If any items are missing from the package, call HPS

Products Customer Service

Department at 1-303-449-9861 or 1-800-345-1967.

Inspect the 937B system for visible evidence of damage. If it has been damaged in

shipping, notify the carrier immediately. Keep all shipping materials and packaging for

claim verification. Do not return the product to HPS

Products.

Table of Contents2
Package Contents7
Safety Information8
Symbols Used in this Manual and Their Definitions8
Safety Precautions8
Safety Procedures and Precautions8
Specifications10
Controller10
Sensors12
Controller Display Messages16
Feature, Control Locations and Dimensions17
Figure 3-1 937B Front Panel17
Figure 3-2 937B Rear Panel17
Figure 3-3 937B External Dimensions (Inches)18
Typical Applications for the Series 937B Controller19
HPS Products Series 937B Multi-Sensor High Vacuum System20
Figure 5-1 937B Front View20
Operating the Series 937B Controller22
Power22
Front Panel Control Lock22
Front Panel Display22
Standard Front Panel Display22
Figure 6-1 Standard 937B LCD Front Panel Display for Pressure Measurement under Leak Detection Mode22
Large Font Displays23
System Setup24
Overview of 937B System Setup24
Figure 6-2 a Comparison between Standard Display Mode and Large Font Display Mode for the 937B LCD Display During Pressure Measurement24
Figure 6-3 937B System Setup Parameters, Their Default Values and Ranges24
Display System Setup Parameters25
Change and Save a Parameter Value25
Figure 6-4 System Setup Information Displayed on 937B LCD Screen25
Description of the System Setup Parameters26
Figure 6-5 Setting DAC Logarithmic and Linear Analog Output28
Table 6-1 Valid Gauges for Autozeroing Capacitance Manometers of Different Ranges28
Figure 6-6 System Firmware and Serial Number Information Displayed on 937B LCD Screen29
Channel Setup for Pressure Measurement30
Overview of 937B Channel Setup30
Setup for a Capacitance Manometer32
Setup for a PR (Pirani)/Cp (Convection Pirani) Sensor34
Setup a Cold Cathode Sensor37
Setup a Hot Cathode Sensor40
Figure 6-11 Hot Cathode Setup Information Displayed on 937B LCD Screen41
Table 6-2 Relative Ionization Correction Factor to N2 for Different Gases41
Power Control of a Pressure Sensor43
Power (Including Degas) Control of a Sensor Using Front Panel Control Button43
Power (Including Degas) Control of a Sensor Via 37 Pin AIO Dsub Connector44
Power (Including Degas) Control of a Sensor Using Serial Communication Commands.4545
Leak Test Using the 937B Controller45
Leak Test Principle Applied for the 937B45
Table 6-3 Pin out for Ion Gauge Remote Control45
Procedures for a Leak Test with the 937B46
Installing Vacuum Sensors48
Installing Cold Cathode Sensors48
Locating a Cold Cathode Sensor48
Orienting a Cold Cathode Sensor48
Managing Contamination in a Cold Cathode Sensor48
Connecting the Series 421/422 Sensor48
Connecting the 423 I-MAG Sensor49
Installing Hot Cathode Sensors49
Locating a Hot Cathode Sensor49
Preventing Contamination in a Hot Cathode Sensor49
Orienting a Hot Cathode Sensor49
Connecting a Hot Cathode Sensor to the Vacuum System49
Connecting a Hot Cathode Sensor to the 937B Controller50
Figure 7-1 13 Pin D-Sub Connector on the Back of 937B HC Board50
Table 7-1 Hot Cathode Connector Pin out50
Figure 7-2 LPN Gauge Cable Diagram51
Figure 7-3 Mini BA Gauge Cable Diagram51
Table 7-2 Pin Assignment for HC Sensor Type Identification51
Installing Pirani Sensors52
Locating a Pirani Sensor52
Preventing Contamination in a Pirani Sensor52
Orienting the Series 317 Pirani Sensor52
Orienting the Series 345 Pirani Sensor52
Connecting the Series 317/345 Sensors52
Figure 7-4 317/345 Cable Diagram53
Table 7-3 Pin out for 317/345 Cables53
Preparing the 317 Sensor for Bakeout54
Capacitance Manometers - MKS Baratron54
Installing a Baratron Capacitance Manometer54
Connecting a Baratron™ Capacitance Manometer54
Table 7-4 Pin out of the 9 Pin D-Sub Connector on CM Module54
Figure 7-5 the Wiring Diagram for the Capacitance Manometer Cable55
Connecting Relay and Analog Outputs56
Connecting 937B Relay Outputs56
Pin out for the 937B Relay Output56
Table 8-1 Pin out for the 937B Relay Output56
Proper Setting of a Relay57
Figure 8-1 Definition of the Parameters Used for Relay Control57
Relay Inductive Loads and Arc Suppression58
Connecting the 937B Analog Output58
Figure 8-2 the Relay Arc Suppression Network58
Buffered Analog Output59
Table 8-2 Pin out for 937B Analog Output59
Table 8-3 Buffered Analog Output When Sensor Power Is off59
Figure 8-3 Buffered Analog Output for Cold Cathode Gauges (421/422/423) in N60
Table 8-4 Buffered Analog Output for the Cold Cathode Gauges (421/422/423) in N61
Table 8-5 Equations for Cold Cathode Gauges (N ) Raw Analog Output61
Figure 8-4 Buffered Analog Output for Hot Cathode Gauges; same as the Logarithmic Analog Output62
Figure 8-5 Buffered Analog Output for a 345 Pirani Gauge63
Table 8-6 Buffered Analog Output for the 315/345 Pirani Sensors64
Table 8-7 Equations for the 315/345 Pirani Sensors65
Figure 8-6 Buffered Analog Output for the 317 Convection Pirani Gauge66
Table 8-8 Buffered Analog Output for the 317 Convection Pirani Sensor67
Table 8-9 Equations for the 317 Convection Pirani Sensor68
Logarithmic/Linear and Combination Analog Output69
Figure 8-7 Buffered Analog Output for Capacitance Manometers69
Logarithmic/Linear Analog Output70
Combination Analog Output70
Figure 8-8 Setup Screen for Setting Combination Channel Parameters71
Logarithmic/Linear Analog Output When the Gauge Power Is Turned off72
RS232/485 Serial Communication Commands73
Communication Protocols73
Table 9-1 937B Serial Communication Wiring Diagram73
Table 9-2 937B Serial Communication Command Protocol73
Pressure Reading Commands74
Table 9-3 937B Pressure Reading Commands74
Relay and Control Setting Commands75
Table 9-4 937B Relay and Control Serial Setting Commands75
Capacitance Manometer Control Commands76
Pirani and Convection Pirani Control Commands76
Table 9-5 937B Capacitance Manometer Serial Commands76
Table 9-6 937B Pirani and Convection Pirani Control Commands76
Cold Cathode Control Commands77
Table 9-7 937B Cold and Hot Cathode Control Commands77
Hot Cathode Control Commands78
Table 9-8 937B Cold and Hot Cathode Control Commands78
System Commands79
Error Code80
Table 9-13 937B System Commands80
Table 9-14 937B Serial Communication Error Codes80
Profibus Communication Protocol and Commands81
Electrical Connections81
Profibus GSD Protocol81
Table 9-15 937B Profibus Electrical Connections81
Table 9-16 937B Profibus Command List82
Profibus Output Buffer Map83
Table 9-17 937B Profibus Output Buffer Map84
Profibus Input Buffer Map85
Table 9-18 937B Profibus Input Buffer Map87
Emulated Operation and RS232/485 Serial Communication Commands88
Operating the 937B Controller in 937A Emulated Operation Mode88
Table 10-1 Description of Pin Assignment for Adapting 937A 15 Pin Connector to 937B 25 Pin Connector for Relay Output88
Table 10-2 a Description of the Pin Assignments for Adapting the 937A 25 Pin Connector to the 937B89
Communication Protocols90
Table 10-4 937B Serial Communication Wire Diagram90
Table 10-5 the 937A Serial Communication Command Protocol90
Pressure Reading Commands91
Table 10-6 937A Pressure Reading Serial Commands91
Relay and Control Setting Commands92
Cold Cathode Control Commands92
Table 10-7 the 937A Relay and Control Setting Commands92
Table 10-8 the 937A Cold Cathode Control Commands92
User Calibration Commands93
System Commands93
Table 10-9 937A User Calibration Commands93
Table 10-10 937A System Commands93
ASCII Character Table94
Table 10-11 ASCII Character Table94
Maintenance of Series 937B Controller Modules95
Removing and Installing a Sensor Module95
Removing and Installing AIO Module96
Figure 11-1 Instructions for Removing AIO Module96
Communication Module97
Power Supply97
Figure 11-2 Instruction for Connecting Wire on the Back of the Power Cord Receptor97
Mounting the 937B Controller98
Figure 11-3 the 937B Controller Power Supply98
AC Power Cord99
Maintenance and Service of HPS Vacuum Sensors100
Cold Cathode Sensor100
Cold Cathode Theory100
Figure 12-1 a Comparison of Inverted Magnetron (Left) and Penning (Right) Cold Cathode Gauges100
Maintenance of Series 421/422 Cold Cathode Sensor101
Figure 12-2 Electron Orbits and Ion Production in an Inverted Magnetron101
Figure 12-3 an Exploded View of the 421/422 Cold Cathode Gauge Assembly102
Maintenance of Series 423 I-MAG Cold Cathode Sensor104
Connecting the I-MAG Sensor104
Disassembling the I-MAG Sensor104
Figure 12-4 an Exploded View of the Series 423 I-MAG Cold Cathode Gauge Sensor105
Cleaning the I-MAG Sensor106
Assembling the I-MAG Sensor106
Preparing the Sensor for Bakeout107
Maintenance of Low Power Nude and Mini BA Hot Cathode Sensors107
Hot Cathode Theory107
Cleaning the Hot Cathode Sensor108
Figure 12-5 BA Gauge Structure and Electron Process Inside the Gauge108
Testing the Hot Cathode Sensor109
Maintenance of Pirani Sensors109
Theory of a Pirani Pressure Sensor109
Figure 12-6 Filament Pin Locator for LPN and Mini BA Gauges109
Table 12-1 Resistance Readings of a Normal HC Sensor109
Cleaning the Series 345 Sensor110
Figure 12-7 Schematic of a Pirani Thermal Conductivity Sensor110
Figure 12-8 Natural Convection Heater Transfer in Horizontal (Left) and Vertical (Right) Sensor Tubes110
Cleaning the Series 317 Sensor111
Table 12-2 Bridge Resistance Value for a Normal 345 Pirani Sensor111
Maintenance of Capacitance Manometer112
Theory of a Capacitance Manometer112
Figure 12-9 Exploded View of a MKS Capacitance Manometer Sensor112
Table 12-3 Resistance Values for a Normal 317 Convection Enhanced Pirani Sensor112
Repairing the Baratron™ Capacitance Manometer113
Spare Parts and Accessories114
Appendix117
Hot Cathode Gauge Gas Correction Factors117
Product Warranty120

Brand	MKS
Model	937B Series
Category	Controller
Language	English

MKS 937B Series User Manual

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MKS 937B Series Specifications

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