MKS 937B Operation Manual
93
10.6 User calibration commands
Command Function Response Meaning
ATMn=F
ZEROn=F
(n=2 to 5)
Set channel n atmosphere
or zero calibration to factory
setting
OK
Action taken
NO CAL!
This module type cannot be calibrated.
CALLOCK!
Calibration is locked by the XCA
command
OUT!
Pressure out of range
ATMn=U
(n=2 to 5)
Set the pressure on
channel n to ATM (760 torr)
OK
ZEROn=U
(n=2 to 5)
Zero the pressure on
channel n
OK
Table 10-9 937A user calibration commands.
10.7 System commands
Command Function Response Meaning
EFRONT
XFRONT
Enable/Disable front panel
OK
Action taken
FRONT
Read state of front panel
lock
FP FREE
FP LOCK
Front panel is enabled.
Front panel is disabled.
ECAL
XCAL
Enable/Disable user
calibration
OK
Action taken
CAL
Read state of user
calibration lock
CALFREE
CALLOCK
User calibration is enabled.
User calibration is disabled.
ECOM
XCOM
Lock the communication
setting including mode,
baud rate, and address
OK
Action taken
COM
Read state of
communication lock
COMFREE
COMLOCK
Change of COMM setting is enabled.
Change of COMM setting is disabled.
Tt
(t=0,1,4,8)
Set delay in ms for RS-485
time delay
OK
Action taken
NOT485!
Communication is not in multidrop
mode.
TD
Read time delay t ms Time delay is t ms.
GAUGES
Read sensor module types
presently installed
GaT1T2T3
Tn=2
character
module type
in slot CC, A
and B.
Cc: Cold cathode
Pr: Dual Pirani
Cm: Dual capacitance manometer
Nc: No module in slot
Wc: Wrong module in CC slot
VER
Read controller module FW
version
c.cc,m.mm
(c,m=0 to 9)
c.cc: Controller version
m.mm:
Table 10-10 937A system commands.
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