MKS 937B Series User Manual

MKS 937
B
12
M
S
e
12.1
4
12.1.1
A
mbient
g
sensitivit
y
are not st
a
isolation
c
allows a
w
Figure 1
2
Cold cath
x
N
r
e
x
N
x
N
x
D
x P
x T
c
a
x L
e
a
n
A
cold ca
t
between
t
perpendi
c
spiral traj
e
providing
In operati
o
collisions
The relati
o
B
Operation M
a
M
ainte
e
nsors
4
21 Cold
c
Col
d
g
as molecule
s
y
is enhanced
a
ndard Penn
c
ollector, as
s
w
ider range o
2
-1 A com
p
ode ionizatio
n
N
o filament to
e
latively inse
n
N
o X-ray limit
N
o adjustmen
t
D
egassing is
n
roperly desig
he control cir
a
thode sens
o
e
ss power c
o
n
d the senso
r
t
hode sensor
t
hem. The el
e
c
ular to the el
e
e
ctories withi
n
a significant
o
n, a near c
o
between ele
c
o
nship betw
e
a
nual
nance
c
athode
s
d
cathode
s
are ionized
by the pres
e
ing sensors i
n
s
hown in Figu
f
pressure m
e
p
arison of I
n
n
sensors ha
v
break or bur
n
n
sitive to da
m
for lower pre
t
for emission
n
ot needed.
ned sensor t
u
cuit is simple
o
r which has
t
o
nsumption e
n
r
.
consists of
a
e
ctrodes are
s
e
ctric field. T
h
n
the sensor,
i
ncrease in i
o
o
nstant circul
a
c
trons and re
s
e
en sensor c
u
and
S
s
ensor
theory
by a high vol
e
nce of a ma
g
n
that they e
m
re 12-1. This
e
asurement.
n
verted Mag
n
v
e inherent a
d
n
out, which
m
m
age due to v
i
ssure measu
current or fil
a
u
bes can be
c
and reliable,
t
hree.
n
ables the us
cathode an
d
s
urrounded b
y
h
e crossed e
l
increasing t
h
o
nization effic
a
ting electric
a
s
idual gas m
o
u
rrent and pr
e
100
S
ervic
e
tage dischar
g
g
netic field. H
m
ploy an inv
e
makes the s
e
n
etron (left)
a
d
vantages o
v
m
akes the ga
u
i
bration.
rements.
a
ment voltag
e
c
leaned and
r
having only
o
e of significa
n
d
an anode wi
y
a magnet,
a
l
ectric and m
a
h
e chance of
c
iency over a
h
a
l current is tr
a
o
lecules prod
e
ssure is
k
i
e
of H
P
g
e in cold cat
h
PS

Product
s
e
rted magnet
r
e
nsor less s
u
a
nd Penning
v
er hot catho
d
uge immune
e
is needed.
r
eused almo
s
o
ne current l
o
n
tly longer c
a
i
th a potentia
l
a
rranged so t
h
a
gnetic fields
c
ollisions wit
h
h
ot cathode
s
a
pped by the
uce ions that
n
k
P
, where
i
P
S

V
a
hode sensor
s
s
Group’s col
r
on design th
a
u
sceptible to
c
g
(right) cold
d
e sensors.
T
to inrushes
o
s
t indefinitely.
o
op, as com
p
a
bles betwee
n
l
difference o
f
he magnetic
f
cause electr
o
h
gas molecu
s
ensor.
crossed fiel
d
t
are collecte
d
is the senso
r
cuum
s
and gauge
d cathode se
a
t includes a
n
c
ontaminatio
n
cathode ga
u
T
hese include
o
f air. As well,
p
ared with a h
n
the controll
e
f
several kilo
v
f
ield is
ons to follow
les, thereby
d
s in which th
d
by the cath
o
r
ion current,
nsors
n
n
and
u
ges.
:
it is
h
ot
e
r
v
olts
long
e
o
de.
k
is

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English