MKS 937B Series User Manual

MKS 937B Operation Manual
2
Table of Contents
Package Contents .................................................................................................................................. 7
1 Safety Information ..................................................................................................................... 8
1.1 Symbols Used in this Manual and their definitions ......................................................... 8
1.2 Safety Precautions .......................................................................................................... 8
1.2.1 Safety Procedures and Precautions ............................................................................ 8
2 Specifications .......................................................................................................................... 10
2.1 Controller ....................................................................................................................... 10
2.2 Sensors ......................................................................................................................... 12
2.3 Controller Display Messages ........................................................................................ 16
3 Feature, Control Locations and Dimensions ........................................................................... 17
4 Typical Applications for the Series 937B Controller ................................................................ 19
5 HPS
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Products Series 937B Multi-Sensor High Vacuum System .......................................... 20
6 Operating the Series 937B Controller ..................................................................................... 22
6.1 Power ............................................................................................................................ 22
6.2 Front Panel Control Lock............................................................................................... 22
6.3 Front Panel Display ....................................................................................................... 22
6.3.1 Standard front panel display ...................................................................................... 22
6.3.2 Large font displays ..................................................................................................... 23
6.4 System Setup ................................................................................................................ 24
6.4.1 Overview of 937B System setup ................................................................................ 24
6.4.2 Display system setup parameters .............................................................................. 25
6.4.3 Change and save a parameter value ......................................................................... 25
6.4.4 Description of the system setup parameters ............................................................. 26
6.5 Channel Setup for Pressure Measurement ................................................................... 30
6.5.1 Overview of 937B Channel setup .............................................................................. 30
6.5.2 Setup for a Capacitance Manometer ......................................................................... 32
6.5.3 Setup for a PR (Pirani)/CP (convection Pirani) sensor .............................................. 34
6.5.4 Setup a Cold Cathode Sensor ................................................................................... 37
6.5.5 Setup a Hot Cathode Sensor ..................................................................................... 40
6.6 Power Control of a Pressure Sensor ............................................................................. 43
6.6.1 Power (including degas) control of a sensor using front panel control button ........... 43
6.6.2 Power (including degas) control of a sensor via 37 pin AIO Dsub connector ........... 44
6.6.3 Power (including degas) control of a sensor using Serial communication commands.45
6.7 Leak Test Using the 937B Controller ............................................................................ 45
6.7.1 Leak test principle applied for the 937B ..................................................................... 45
6.7.2 Procedures for a leak test with the 937B ................................................................... 46
7 Installing Vacuum Sensors ..................................................................................................... 48
7.1 Installing cold cathode sensors ..................................................................................... 48
7.1.1 Locating a Cold Cathode Sensor ............................................................................... 48
7.1.2 Orienting a Cold Cathode Sensor .............................................................................. 48
7.1.3 Managing Contamination in a Cold Cathode Sensor ................................................. 48
7.1.4 Connecting the Series 421/422 Sensor ..................................................................... 48
7.1.5 Connecting the 423 I-MAG Sensor ............................................................................ 49

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English