MKS 937B Series User Manual

MKS 937B Operation Manual
114
13 Spare Parts and Accessories
Part #
Accessories
USA power cable 103150001
Half rack mounting kit 100005651
Full rack mounting kit 100007700
937B Instruction Manual 100016467
Rebuild kit for Series 421 100006734
Spanner Wrench for 421 tube rebuild 100005279
Rebuild kit for Series 423 I-MAG
®
100002353
Adapter, SMA-F to BNC-M 100016120
Adapter, Connector, SMA-M to BNC-F 100016121
Fuse (2X) inside the inlet power connector 100015755
Module, plug-in
Cold Cathode 100015185
Hot Cathode (MIG/LPN) 100015641
Dual Capacitance Manometer/Piezo 100015267
Dual Standard Pirani/Convection Pirani 100015132
ProfiBus 100015940
Serial Firmware Download Adaptor
Adaptor 100016642
Cable for Capacitance Manometer, Type 722B
10 ft (3.0 m) 100016951
25 ft (7.6 m) 100016952
50 ft (15.2 m) 100016953
Cable for Capacitance Manometer, Type 626B/627D
10 ft (3.0 m) 100007555
25 ft (7.6 m) 100007556
50 ft (15.2 m) 100007557
Custom to 50 ft (15.2 m) 100007558
Cable for Cold Cathode Sensor, Series 431
10 ft (3.0 m) 100016217
25 ft (7.6 m) 100016218
50 ft (15.2 m) 100016219
100 ft (30.5 m) 100016220
Custom to 300 ft (91.4 m) 100016221
Cable for Cold Cathode Sensor, Series 423 I-MAG
®
2 ft (0.6 m) 100016295
10 ft (3.0 m) 100016296
25 ft (7.6 m) 100016297
50 ft (15.2 m) 100016298
Custom to 300 ft (91.4 m) 100016299
Cable for Hot Cathode, Mini BA Gauge
10 ft (3.0 m) 100011106
25 ft (7.6 m) 100011107
50 ft (15.2 m) 100011108
Cable for Hot Cathode, Low Power Nude
10 ft (3.0 m) 100010909
25 ft (7.6 m) 100010910
50 ft (15.2 m) 100010911
Cable for 317 Convection Pirani & 345 Pirani Sensor
10 ft (3.0 m) 103170006SH
25 ft (7.6 m) 103170007SH
50 ft (15.2 m) 103170008SH

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English