MKS 937B Series User Manual

MKS 937B Operation Manual
13
Pirani, CP <80 msec
CM <80 msec
Resolution
7
CC & HC 2 significant digits between 10
-10
and 10
-3
Torr, 1 significant digit
in 10
-11
and 10
-2
Torr decades
Pirani 2 significant digits between 10
-3
and 99 Torr, 1 significant digit
elsewhere within the gauge’s range
CP 2 significant digits
CM 4 significant digits
Repeatability
CC, HC, Pirani, CP 5% of indicated pressure at constant temperature
CM 0.25% of indicated pressure at constant temperature
Calibration gas
CC, HC Nitrogen, Argon
Pirani, CP Air/nitrogen, Argon, Helium
CM Any (gas independent)
Installation orientation
CC, HC, CM, Pirani Any (port down suggested for pressure sensor)
CP Body horizontal only
Materials exposed to vacuum may include
CC Series 421 and 422 – SS 304, Al 6061, silver-copper brazing
alloy, alumina ceramic, Elgiloy
®
, OFHC
®
copper
Series 423 – SS 302, SS 304, glass, Al, Inconel X-750
®
, alumina
ceramic
HC 304 SS, Inconel
®
X750, glass, tungsten, platinum clad
molybdenum, tantalum, nickel, braze alloy, either yttria coated
iridium or tungsten filament
Pirani 300 series stainless, platinum, alumina ceramic, silver brazing
alloy, nickel 200
CP 300 series stainless, nickel, glass, platinum
CM Inconel
®
Internal volume
8
CC Series 421and 422 - 1.8 in
3
(30 cm
3
)
Series 423 - 0.9 in
3
(15 cm
3
)
7
Trailing zeros displayed on LCD screen do not reflect the resolution of the pressure reading.
8
Volume will vary with the type of vacuum connection selected

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English