MKS 937B Operation Manual
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x Leak checking status (activated by the leak check button)
x System self-checking information (board status, sensor status, pressure range, and etc)
x Front panel locking status (when REMOTE is displayed, the front panel is locked remotely)
Controller operation is very simple. For example, to access the system setup screen, simply push the
System Setup button. This permits single-screen access and adjustment for all of the control and display
parameters for each sensor connected to the controller. An LED indicates the current active channel and
all of the parameters associated with the sensors are displayed by pushing the Channel Setup button.
In addition to the pressure values displayed on the screen, three types of analog signals are also shown:
x Buffered analog outputs for each sensor (up to 6). These buffered analog signals respond
immediately to sensor signal changes, therefore, can be used in critical fast control applications.
x Logarithmic/linear analog outputs for each pressure sensor (up to 6) ranging from 0 to 10 V. The
scale for these analog outputs can be adjusted as desired. While these linear signals are
somewhat simpler to deal with than the sensor-dependent buffered analog signals, there is a
longer time delay (<100 msec) due to the signal processing required by the microprocessor.
x There are also combined analog outputs (up to 2) available. By combining the sensors with
different measurement ranges (such as Pirani and cold cathode sensors), analog signals with
much wider range are available. This eliminates the requirement for switching/selecting the
sensor. The time delay for these analog outputs is around 100 msec.
Twelve (12) mechanical relays with independently adjustable controller relay set points allow the 937B to
control the operation of critical components in a vacuum system such as valve or a pump. The set point
parameters are nonvolatile, remaining unchanged after powering down or during a power failure. They
may be set or disabled from either the front panel or the optional communications module.
The Controller also has control set points to turn off ion gauges at higher pressures, extending the
operating lifetime before maintenance is required (for both cold cathode or hot cathode).
Direct computer communication is available to control front panel functions or read pressure and other
information remotely. A RS232/485 serial port is available and the communication protocol can be
selected from the System Setup panel.
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