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MKS 651D Series User Manual
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Copyright © 2001 by MKS Instruments, Inc.
All rights reserved. No part of this work
may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by
MKS Instruments, Inc.
Barat
ron
is a registered trademark of MKS Instruments, Inc., Andover, MA
This manual is for firmware version: pre
-
release
1
3
Table of Contents
Table of Contents
3
Safety Information
13
Symbols Used in this Instruction Manual
13
Symbols Found on the Unit
14
Table 1: Definition of Symbols Found on the Unit
14
Safety Procedures and Precautions
15
Chapter One: General Information
17
Introduction
17
How this Manual Is Organized
18
Customer Support
19
Chapter Two: Installation
21
How to Unpack the Type 651 Unit
21
Unpacking Checklist
21
Product Location and Requirements
22
Operating Environmental Requirements
22
Safety Conditions
22
Product Compatibility
23
Valves
23
Transducers
23
Table 2: Transducer Current Available
23
Interface Cables
24
Table 3: System Interface Cables
24
Adapter Cables
25
Table 4: Adapter Cables
25
Generic Shielded Cables
26
Figure 1: Preferred Method to Connect an Overall Metal Braided Shielded Cable
27
Figure 2: Alternate Method to Connect an Overall Metal Braided Shielded Cable
27
Setup
28
Mounting Instructions
28
Power and Fuse Requirements
28
Table 5: Power and Fuse Requirements
28
Grounding
29
How to Set the Line Voltage
29
Figure 3: Line Voltage Selector
29
Connectors
31
Rear Panel Connectors
31
Table 6: Rear Panel Connector Slot Labels
31
RS-232 Serial Interface Connector
32
Table 7: RS-232 Serial Interface Connector Pinout
32
Interface (I/O) Connector
33
Table 8: Interface Connector Pinout
34
Transducer Connector
35
Table 9: Transducer Connector Pinout
35
Valve Connector
36
Table 10: Valve Connector Pinout
36
Chapter Three: Overview
37
Control Mode
37
Gain and Phase
37
Figure 4: Gain Set too High
38
Figure 5: Gain Set too Low
38
Figure 6: Phase Set too High
39
Figure 7: Phase Set too Low
39
Set Points
40
Softstart Rates
40
Process Limit Relays
41
Front Panel Components
42
Display Window
42
Key Lock Switch
42
Figure 8: Front Panel of the 651 Controller
42
Arrow Keys
43
Adjust Knob
43
Learn Key
43
Valve Position Control Keys
43
Set Point Selection Keys
43
Rear Panel Components
44
Valve Connector - Slot 4
44
Transducer Connectors - Slot 3
44
Interface Connector - Slot 2
44
Serial Interface Connector - Slot 1
44
Power ON/OFF Switch
44
Figure 9: Rear Panel of the 651 Controller
44
Line Voltage Selector Switch
45
Fuse Holder
45
Optional Valve Failsafe Battery Back-Up
46
Battery Voltage
46
Valve Positions
46
Threshold Voltage Check
47
Expected Battery Life
47
Table 11: Expected Battery Life
47
Battery Storage
48
Table 12: Capacity Loss of Stored Battery
48
Labels
49
Voltage and Fuse Label
49
Serial Number Label
49
Attention Label
49
Figure 10: Voltage and Fuse Labels
49
Figure 11: Serial Number Label
49
Chapter Four: Local Operation
51
General Information
51
Startup
52
Optional Valve Failsafe Battery Back-Up
52
Figure 12: Initial Display Screen
52
Figure 13: Pressure and Position Display Screen
52
Figure 14: Battery Voltage Low Message
53
Figure 15: Battery Voltage High Message
53
How to Check the Battery Voltage
54
Setup
55
How to Select and Calibrate the Valve
55
How to Set the Operating Parameters
55
Table 13: Full Scale Sensor Ranges
58
How to Adjust the Set Point Parameters
63
Operation
71
How to Activate a Set Point
71
How to Control the Valve
72
How to Use the Sensor Zero
73
To Change the Displayed Sensor
73
How to Use the Special Zero
73
How to Remove the Zero Correction Factors
75
How to Zero the Analog Set Point
75
How to Calibrate the Full Scale of the Analog Set Point
76
Chapter Five: Remote RS-232 Operation
79
General Information
79
RS-232 Protocol
80
Message Syntax
81
Priority and Timing of Command Execution
81
Setup Messages
82
Table 14: RS-232 Setup Messages
83
How to Read the Pressure Control Mode
86
How to Set the Pressure Units
87
How to Enable Backfill Valve Control
88
How to Set the Set Point Backfill Limit
88
How to Set the Backfill Threshold Pressure Value
89
How to Set the Valve Battery Back-Up Control
89
How to Set the Valve Position Signal Output Range
89
How to Read the Sensor Type
91
How to Set the Sensor Signal Input Range
92
How to Set the Sensor Range
93
Table 15: Sensor Range Values
93
Table 16: RS-232 Set Point Messages
96
How to Set the Type of Set Point Control
98
How to Set the Analog Set Point Range
99
How to Set the Set Point Values
100
How to Set the Gain Values
102
How to Set the Gain Compensation Factor
103
How to Set the Phase Values
104
How to Set the Phase Compensation Factor
105
How to Set the Softstart Rates
106
How to Set the Process Limit Relays
108
Control Messages
109
How to Activate a Set Point
111
How to Control the Valve
112
How to Use the Sensor Zero
113
How to Use the Special Zero
113
How to Remove the Sensor and Special Zeros
113
How to Zero the Analog Set Point
114
How to Calibrate the Full Scale of the Analog Set Point
115
Informational Messages
116
Table 17: RS-232 Informational Messages
116
How to Report the Pressure Reading
118
How to Report the Valve Position Value
119
How to Report the System Status
120
How to Report the Voltage Status of the Valve Battery Back-Up
121
How to Report the Checksum Status
122
How to Report the Firmware Version
122
Chapter Six: Remote Digital Logic Control
123
General Information
123
How to Select the Digital Input Functions
123
Figure 16: I/O Board Digital Input Circuitry
123
Table 18: Digital Input Functions
124
How to Set the Analog Set Point Inputs
125
Digital Input Priorities
126
Table 19: Priority of Digital Inputs
126
How to Select the Digital Output Functions
127
Figure 17: I/O Board Digital Output Circuitry
127
Table 20: Digital Output Functions
128
How to Activate the Softstart Rate
129
Chapter Seven: Maintenance and Troubleshooting
131
General Information
131
Maintenance
131
How to Replace the Fuses
131
Figure 18: Fuse Holder
132
How to Replace the Memory (RAM) Module
133
Figure 19: Location of the Battery-Backed RAM Module
134
How to Replace the Optional Valve Failsafe Battery
136
Troubleshooting
138
How to Identify an Out-Of-Range Pressure Condition
138
How to Respond to a Checksum Error
139
How to Calibrate the Span of the A/D Converter
140
Appendix A: Product Specifications
143
Appendix B: Model Code Explanation
145
Model Code
145
Appendix C: Initial Settings
147
Table 21: Initial Settings
147
Appendix E: RS-232 Message Summary
151
Table 22: RS-232 Message Summary
151
Index
159
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MKS 651D Series Specifications
General
Brand
MKS
Model
651D Series
Category
Controller
Language
English
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