Newport FSM-CD300B - Page 30

30 System Components
Pin
Controller
Pin
FSM Head
Name
Type
Controller
Description
1 6 +15VA DC power FSM positive 15V power
2 11 -15VA DC power FSM negative 15V power
3 2 B- Analog input B axis position sensor negative (±10V)
4 8 B_RTN Analog output B axis actuator drive return
5 13 B_OUT Analog output B axis actuator drive output
6 4 A- Analog input
A axis position sensor negative (±10V)
7 10 A_RTN Analog output A axis actuator drive return
8 15 A_OUT Analog output A axis actuator drive output
9 1 GND Analog ground FSM ground reference and power return
10 7 B+ Analog input
B axis position sensor positive (±10V)
11 12 B_TEMP_RTN Analog ground B axis temperature sensor return (Analog Ground)
12 3 B_TEMP Analog input B axis temperature sensor signal
13 9 A+ Analog input
A axis position sensor positive (±10V)
14 14 A_TEMP_RTN Analog ground A axis temperature sensor return (Analog Ground)
15 5 A_TEMP Analog input A axis temperature sensor signal
Table 1. FSM pinout descriptions of 15-pin interface cable.
Figure 13: FSM pinout diagram of 15-pin interface cable.