HEC-OM-S002
Table of Contents
TOC-1
Table of Contents
Chapter 1 Safety Instructions ............................................................... 1-1
1.1 Dangers, Warnings, and Cautions Used in This Manual........................................1-1
1.1.1 Hazard Levels ..................................................................................................................... 1-1
1.1.2 Definitions of “Serious injury” and “Minor injury” ................................................................. 1-2
1.1.3 Symbols............................................................................................................................... 1-2
1.2 Hazard Warning Labels .............................................................................................1-4
1.2.1 Content of label ................................................................................................................... 1-4
1.2.2 Location of hazard warning labels....................................................................................... 1-5
1.3 Location of Alarm Label ............................................................................................1-5
1.4 Location of Piping and Connector Label.................................................................1-6
1.5 Location of Model Label............................................................................................1-6
1.6 Safety Measures.........................................................................................................1-7
1.6.1 Precautions ......................................................................................................................... 1-7
1.6.2 Protective Equipment .......................................................................................................... 1-8
1.6.3 Long-term Storage...............................................................................................................1-8
1.6.4 Disposing of Product ........................................................................................................... 1-8
1.7 Safety Interlocks ........................................................................................................1-9
Chapter 2 Description and Function of Each Part .............................. 2-1
Chapter 3 Transporting and Installation .............................................. 3-1
3.1 Transporting ...............................................................................................................3-1
3.2 Installation ..................................................................................................................3-2
3.2.1 Installation Conditions .........................................................................................................3-2
3.2.2 Installation in Clean Room .................................................................................................. 3-3
3.2.3 Pollution Degree.................................................................................................................. 3-3
3.2.4 Installation of Brackets ........................................................................................................3-4
3.3 Wiring..........................................................................................................................3-5
3.3.1 Power Sourse Specification ................................................................................................ 3-6
3.3.2 Power Supply Cable and Connector................................................................................... 3-6
3.3.3 Connector for External Equipment ...................................................................................... 3-7
3.3.4 Procedures for wiring instllation .......................................................................................... 3-7
3.4 Installation of Facility Water Piping .........................................................................3-8
Chapter 4 System Set-up....................................................................... 4-1
4.1 Pre-check....................................................................................................................4-1
4.2 Facility Water..............................................................................................................4-1
4.2.1 Reference of water quality .................................................................................................. 4-1
4.2.2 Facility water run through.................................................................................................... 4-2
4.3 Filling Bath liquid.......................................................................................................4-2
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