Chapter 1 Introduction
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Chapter 1 Introduction
Imported high precision and high stability pressure sensitive
chips are selected for diffused silicon pressure transmitter.
Sensitive chips are fabricated by advanced micro-mechanical
etching process, which forms Wheatstone bridge by diffusing
four high-precision resistors with temperature compensation on
silicon wafers. Because of piezoresistive effect, there are some
changes on the resistance values of the four bridge arm
resistance, so as to make the bridge unbalanced, and then the
sensor outputs an electric signal corresponding to the change
of pressure. The output electric signal is compensated by
amplification and non-linear correction circuit, which generates
voltage and current signals which correspond linearly to the
input pressure.
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