INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200
160Phone:(215) 947-2500 fax:(215) 947-7464 e-mail:sales@televac.com web site:www.televac.com
MM-200_im REV M
Page 13 of 160
NOTE:
Capacitance Diaphragm Gauge Tubes with a range of greater than 1 Torr will not control the Cold
Cathode automatic turn on!
104 VACUUM GAUGE TUBES (cont.)
CAPACITANCE DIAPHRAGM GAUGE - Measures absolute pressure by detecting very small deflections of a
metal diaphragm via a change in capacitance between the diaphragm and one or more electrodes. It is not
sensitive to gas type. These sensors are temperature compensated, but do respond to rapid changes of
temperature. Temperature changes cause zero shifts. In some cases the gauges are heated for stability and to
prevent condensation of process gasses. Users should note that occasional adjustments of the zero point are
normal for sustaining accuracy with this type of sensor, and provision for making this adjustment should be included
in the installation. Fine adjustment of the zero and atmospheric point is accomplished at the rear panel on the
diaphragm module. Sensor ranges (full scale):
5A = 1000 Torr; 5B = 100 Torr; 5C = 10 Torr
5D = 1 Torr; 5E = 0.1 Torr; 5F = special
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