INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200
160Phone:(215) 947-2500 fax:(215) 947-7464 e-mail:sales@televac.com web site:www.televac.com
MM-200_im REV M
Page 60 of 160
TABLE OF DISPLAY DESCRIPTIONS
SOFt 1.35 Software version number 1.35
OFF
51
0 HC gauge (station 5) is OFF.
TC gauge (station 1) is at 0 microns
HCion Auto This means HC is turned off by thermoconductivity
gauge pressure reading only and comes back on
when pressure falls below 10 microns.
HCion SELF This means HC is turned off by HC overpressure only.
HCion both This means HC is turned off by both the HC overpressure and off and on by
the thermo-conductivity gauge pressure reading. (Preferable)
FIL
5
OFF Filament is OFF.
FIL
5
rdy Filament is ready to be turned on by TC reading
below 10 microns.
FIL nbr2 Filament #2 is active.
FIL nbr1 Filament #1 is active.
FIL Err Filament error.
1.2-9
51
0 Station 5 = 1.2x10
-9
Torr, Station 1 = 0 microns.
5
OFF Ion gauge is OFF
FIL
5
on Filament is ON.
5
1.2-9 Station 5 = 1.2x10
-9
Torr.